UHF CMOS-MEMS Bulk Acoustic Wave Resonator

被引：0

作者：

Giner, J. ^{[1
]}

Uranga, A. ^{[1
]}

Marigo, E. ^{[1
]}

Munoz-Gamarra, J. L. ^{[1
]}

Barniol, N. ^{[1
]}

机构：

[1] Univ Autonoma Barcelona, Dept Elect Engn, E-08193 Barcelona, Spain

来源：

2011 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM/EUROPEAN FREQUENCY AND TIME FORUM PROCEEDINGS | 2011年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents a UHF CMOS MEMS resonator working at 384MHz at its bulky mechanical mode. The novel topology proposed allows us to design the resonator taking into account the coupling area of the movable resonator as an important parameter in the design. The structure is fabricated using a commercial CMOS technology. This fact allows to integrate directly the microelectromechanical structure with the electronic. This work presents the measurement of both, the stand alone resonator and the resonator with an amplification circuitry.

引用

页码：151 / 154

页数：4

共 50 条

[21] CHARACTERIZATION OF CMOS-MEMS RESONATOR BY PULSED MODE ELECTROSTATIC ACTUATION
Munoz-Gamarra, J. L.
Marigo, E.
Giner, J.
Uranga, A.
Torres, F.
Barniol, N.
2010 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2010, : 415 - 418
[22] Deposition of Titanium Dioxide Nanoparticles on the Membrane of a CMOS-MEMS Resonator
Ahmed, A. Y.
Dennis, J. O.
Khir, M. H. Md
Saad, M. N. Mohamad
3RD INTERNATIONAL CONFERENCE ON FUNDAMENTAL AND APPLIED SCIENCES (ICFAS 2014): INNOVATIVE RESEARCH IN APPLIED SCIENCES FOR A SUSTAINABLE FUTURE, 2014, 1621 : 522 - 529
[23] Phononic Crystals for Acoustic Confinement in CMOS-MEMS Resonators
Bahr, Bichoy
Marathe, Radhika
Weinstein, Dana
2014 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2014, : 490 - 493
[24] CMOS-MEMS filters
Fedder, G. K.
Mukherjee, T.
2008 IEEE TOPICAL MEETING ON SILICON MONOLITHIC INTEGRATED CIRCUITS IN RF SYSTEMS, DIGEST OF PAPERS, 2008, : 110 - 113
[25] Modeling and Simulation of Polysilicon Piezoresistors in a CMOS-MEMS Resonator for Mass Detection
Gafare, Mawahib
Khir, M. H. Md
Rabih, Almur
Ahmed, Abdelaziz
Dennis, J. O.
2015 IEEE REGIONAL SYMPOSIUM ON MICRO AND NANOELECTRONICS (RSM), 2015, : 29 - 32
[26] STATISTICAL CHARACTERIZATON OF A CMOS-MEMS RESONATOR FOR MONOLITHIC OVENIZED OSCILLATOR APPLICATIONS
Chen, Chao-Yu
Chin, Chi-Hang
Li, Ming-Huang
Li, Sheng-Shian
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015, : 1965 - 1968
[27] A CMOS-MEMS BEAM RESONATOR WITH Q > 10,000
Chen, Ting-Yi
Li, Wei-Chang
2023 IEEE 36TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMS, 2023, : 1151 - 1154
[28] A Capacitively Transduced Bulk Acoustic Wave MEMS Resonator with Low Bias Voltages
Chen, Zeji
Jia, Qianqian
Liu, Wenli
Zhu, Yinfang
Yuan, Quan
Yang, Jinling
Yang, Fuhua
2021 IEEE 16TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2021, : 455 - 458
[29] Simulation and Modeling the Effect of Temperature on Resonant Frequency of a CMOS-MEMS Resonator
Ahmed, A. Y.
Dennis, J. O.
Khir, M. H. Md
Saad, M. N. Mohamad
INTERNATIONAL CONFERENCE ON FUNDAMENTAL AND APPLIED SCIENCES 2012 (ICFAS2012), 2012, 1482 : 32 - 36
[30] CMOS-MEMS membrane for audio-frequency acoustic actuation
Neumann, JJ
Gabriel, KJ
14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2001, : 236 - 239

← 1 2 3 4 5 →