Wavelength-selective switch based on a high fill-factor micromirror array

被引:1
作者
Li, Sihua [1 ,2 ]
Wan, Zhujun [3 ]
Xu, Jing [1 ]
Zhong, Shaolong [1 ]
Wu, Yaming [1 ]
机构
[1] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
[2] Chinese Acad Sci, Grad Univ, Beijing 100049, Peoples R China
[3] Huazhong Univ Sci & Technol, Coll Optoelect Sci & Engn, Wuhan 430074, Peoples R China
基金
中国国家自然科学基金;
关键词
LARGE-SCAN-ANGLE;
D O I
10.3788/COL201109.090601
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A novel design and fabrication approach for a high fill-factor micro-electro-mechanical system (MEMS) micromirror array-based wavelength-selective switch (WSS) is presented. The WSS is composed of a polarization-independent transmission grating and a high fill-factor micromirror array. The WSS is successfully demonstrated based on the fabricated high fill-factor micromirror array. Test results show that the polarization-dependent loss (PDL) is less than 0.3 dB and that the insertion loss (IL) of the wavelength channel is about -6 dB. The switching function between the two output ports of WSS is measured. The forward switching time is recorded to be about 0.5 ms, whereas the backward switching time is about 7 ms.
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页数:3
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