Comprehensive particle and fiber testing for cleanroom wipers

被引:0
作者
Bhattacharjee, HR [1 ]
Paley, SJ [1 ]
机构
[1] Texwipe Co LLC, Upper Saddle River, NJ 07453 USA
来源
JOURNAL OF THE IEST | 1998年 / 41卷 / 06期
关键词
contamination control; cleanroom wipers; particles and fibers; scanning electron microscopy; optical microscopy; particle counting and sizing;
D O I
暂无
中图分类号
X [环境科学、安全科学];
学科分类号
08 ; 0830 ;
摘要
A microscopy-based measurement technique has been developed for accurately quantifying the total number of particles and fibers in all size ranges released from a cleanroom wiper during conditions of simulated use. The method uses both optical and scanning electron microscopy in conjunction with computerized image analysis for counting particles and fibers. The technique uses a single sample preparation for the extraction of both particles and fibers from the wiper. Seven cleanroom wiping products were examined using this measurement technique. The results are shown for the various size groupings of particles and fibers. A composite measure of contamination is presented. This work reveals that a cleanroom wiper may appear very clean in certain size categories and appear extremely dirty in others. The results of this study show that all size ranges of particles and fibers need to be examined when determining the total contamination risk posed by any cleanroom wiper.
引用
收藏
页码:19 / 25
页数:7
相关论文
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