Generation of long and high-density plasma column using metal-antenna surface wave-excited plasma source

被引：11

作者：

Kousaka, H ^{[1
]}

Xu, JQ

Umehara, N

机构：

[1] Nagoya Univ, Grad Sch Engn, Dept Mech Sci & Engn, Chikusa Ku, Nagoya, Aichi 4640814, Japan

[2] Xian Inst Technol, Xian 710032, Peoples R China

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2005年 / 44卷 / 33-36期

关键词：

microwave; surface wave; metal antenna; high-density plasma; plasma column; plasma source;

D O I：

10.1143/JJAP.44.L1052

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We investigated the effect of gas pressure on the length of a microwave-excited high-density plasma column sustained along a graphite rod (25 cm in length and 1.0cm in diameter), which was negatively biased against a grounded chamber. It was confirmed that the length of the overdense (> 10(11) cm(-3)) plasma column increased with increasing gas pressure and negative voltage. At a gas pressure of 33 Pa, we obtained the longest plasma column covering the entire surface of the rod with a negative voltage of -150V and an input microwave power of 100W.

引用

页码：L1052 / L1055

页数：4

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