Electromagnetic analysis of micromachined devices

被引：0
|
作者：
Carbonell, J [1 ]
Danglot, J [1 ]
Mélique, X [1 ]
Dupuis, O [1 ]
Lheurette, E [1 ]
Mounaix, P [1 ]
Vanbésien, O [1 ]
Lippens, D [1 ]
机构：
[1] Univ Sci & Tech Lille Flandres Artois, Dept Hyperfrequences & Semicond, Inst Elect & Microelect Nord, F-59652 Villeneuve Dascq, France
来源：
THE NINETY EIGHT - 1998 IEEE SIXTH INTERNATIONAL CONFERENCE ON TERAHERTZ ELECTRONICS PROCEEDINGS | 1996年
关键词：
micro-machining; EM analysis; terahertz frequency;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, the electromagnetic behaviour of micromachined devices aimed at operating at terahertz frequency is specially addressed. We considered respectively (i) new fabrication techniques for free-standing air-bridged structures for planar device arrays (ii) high-speed low-loss coplanar wave guides deposited on a membrane in GaAs Technology, (iii) metallic/air photonic band gap structures used in filtering and guiding sections (iv) radiating antenna deposited on Low Temperature Groffn GaAs used in pulse optical techniques for Terahertz generation.
引用
收藏
页码：50 / 53
页数：4
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