Electromagnetic analysis of micromachined devices

被引：0

作者：

Carbonell, J ^{[1
]}

Danglot, J ^{[1
]}

Mélique, X ^{[1
]}

Dupuis, O ^{[1
]}

Lheurette, E ^{[1
]}

Mounaix, P ^{[1
]}

Vanbésien, O ^{[1
]}

Lippens, D ^{[1
]}

机构：

[1] Univ Sci & Tech Lille Flandres Artois, Dept Hyperfrequences & Semicond, Inst Elect & Microelect Nord, F-59652 Villeneuve Dascq, France

来源：

THE NINETY EIGHT - 1998 IEEE SIXTH INTERNATIONAL CONFERENCE ON TERAHERTZ ELECTRONICS PROCEEDINGS | 1996年

关键词：

micro-machining; EM analysis; terahertz frequency;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, the electromagnetic behaviour of micromachined devices aimed at operating at terahertz frequency is specially addressed. We considered respectively (i) new fabrication techniques for free-standing air-bridged structures for planar device arrays (ii) high-speed low-loss coplanar wave guides deposited on a membrane in GaAs Technology, (iii) metallic/air photonic band gap structures used in filtering and guiding sections (iv) radiating antenna deposited on Low Temperature Groffn GaAs used in pulse optical techniques for Terahertz generation.

引用

页码：50 / 53

页数：4

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