Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source

被引：0
|
作者：
Nakamura, D. [1 ]
Tamaru, K. [1 ]
Akiyama, T. [1 ]
Takahashi, A. [2 ]
Okada, T. [1 ]
机构：
[1] Kyushu Univ, Grad Sch Informat Sci & Elect Engn, Nishi Ku, 744 Motooka, Fukuoka 8190395, Japan
[2] Kyushu Univ, Grad Sch Med, Higashi Ku, Fukuoka 8128582, Japan
来源：
PHOTON PROCESSING IN MICROELECTRONICS AND PHOTONICS VII | 2008年 / 6879卷
基金：
日本学术振兴会;
关键词：
extreme ultraviolet; laser-produced plasma; debris; fast ions; droplet;
D O I：
10.1117/12.767894
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The results of a comparative investigation on the emission characteristics of debris from CO2 laser-produced tin plasma and Nd: YAG laser-produced tin plasma for an extreme ultraviolet lithography (EUV) light source. The tin ions and droplets emitted from tin plasma produced by a CO2 laser or an Nd: YAG laser were detected with Faraday cups and quartz crystal micro-balance (QCM) detectors, respectively. The large size of droplets was also observed by silicon substrates as witness plates. A higher ion kinetic energy and lower debris emission in the case of CO2 laser in compared with Nd: YAG laser for the same laser energy of similar to 50 mJ. In addition, the dynamics of the neutral atoms and the irradiated target from an Nd:YAG laser-produced tin plasma with a mass-limited micro-droplet target were investigated by imaging techniques.
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页数：9
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