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- [21] Development of EUV light source by laser-produced plasma JOURNAL DE PHYSIQUE IV, 2006, 133 : 1161 - 1165
- [22] Modeling of EUV emission and conversion efficiency from laser-produced tin plasmas for nanolithography EMERGING LITHOGRAPHIC TECHNOLOGIES XII, PTS 1 AND 2, 2008, 6921
- [23] Conversion efficiency calculations for EUV radiation emitted from laser-produced Tin plasmas TURKISH JOURNAL OF PHYSICS, 2009, 33 (06): : 363 - 368
- [26] Analysis, simulation, and experimental studies of YAG and CO2 laser-produced plasma for EUV lithography sources EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY, 2010, 7636
- [28] Development of EUV light source by CO2 laser-produced plasma with nano-structured SnO2 targets Tanaka, H. (tanaka@laserlab.ees.kyushu-u.ac.jp), SPIE (SPIE):
- [29] Development of EUV light source by CO2 laser-produced plasma with nano-structured SnO2 targets FIFTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION, 2004, 5662 : 313 - 318
- [30] Simulation of EUV spectral emission from laser-produced tin-doped water plasmas EMERGING LITHOGRAPHIC TECHNOLOGIES XI, PTS 1 AND 2, 2007, 6517