Microstructural investigation of the PZT films prepared from the suspension of nanocrystalline powders

被引：9

作者：

Brankovic, Z

Brankovic, G

Varela, JA

机构：

[1] UNESP, Inst Quim, BR-14801970 Araraquara, SP, Brazil

[2] Univ Belgrade, Fac Technol & Met, YU-11000 Belgrade, Serbia

[3] Univ Fed Sao Carlos, Dept Quim, BR-13565905 Sao Carlos, SP, Brazil

[4] Univ Belgrade, Ctr Multidisciplinary Studies, YU-11030 Belgrade, Serbia

来源：

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY | 2004年 / 24卷 / 06期

基金：

巴西圣保罗研究基金会;

关键词：

films; microstructure-final; PZT; suspension;

D O I：

10.1016/S0955-2219(03)00541-7

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

PZT thin films of composition Pb(Zr0.52Ti0.48)O-3 were prepared by a novel method from the suspension of nanocrystalline PZT powders. The powders were obtained by mechanochemical synthesis. Films were deposited on silicon (100) and platinum covered silicon substrates (Pt (111) /Ti/SiO2/Si) Using spin-on technique. Substrate type has influence on films crystallinity, orientation and can react with the films changing its phase composition. Films microstructure strongly depends on thermal treatment conditions due to phase and compositional changes of the films. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：1945 / 1948

页数：4

共 13 条

[1] Novel methods for preparation of ion-exchangeable thin films
Abe, R
Ikeda, S
Kondo, JN
Hara, M
Domen, K
[J]. THIN SOLID FILMS, 1999, 343 : 156 - 159
[2] Mechanochemical synthesis of PZT powders
Brankovic, Z
Brankovic, G
Jovalekic, C
Maniette, Y
Cilense, M
Varela, JA
[J]. MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2003, 345 (1-2): : 243 - 248
[3] CRACKING DURING PYROLYSIS OF OXIDE THIN-FILMS - PHENOMENOLOGY, MECHANISMS, AND MECHANICS
CHEN, SY
CHEN, IW
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1995, 78 (11) : 2929 - 2939
[4] Effect of crystallization ambient on orientation selection in sol-gel derived Pb(Zr,Ti)O3 thin films on Pt electrode layers
Fè, L
Vasiliu, F
Norga, GJ
Wouters, DJ
Van der Biest, O
[J]. EURO CERAMICS VII, PT 1-3, 2002, 206-2 : 1259 - 1262
[5] Ferroelectric ceramics: History and technology
Haertling, GH
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1999, 82 (04) : 797 - 818
[6] Effect of substrate material on the crystallinity and epitaxy of Pb(Zr,Ti)O3 thin films
Hwang, KS
Manabe, T
Nagahama, T
Yamaguchi, I
Kumagai, T
Mizuta, S
[J]. THIN SOLID FILMS, 1999, 347 (1-2) : 106 - 111
[7] Effects of mechanical activation on the sintering and dielectric properties of oxide-derived PZT
Lee, SE
Xue, JM
Wan, DM
Wang, J
[J]. ACTA MATERIALIA, 1999, 47 (09) : 2633 - 2639
[8] Microstructure of TiO2 and ZnO films fabricated by the sol-gel method
Ohya, Y
Saiki, H
Tanaka, T
Takahashi, Y
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1996, 79 (04) : 825 - 830
[9] Microstructure and electrical properties of PbZr0.48Ti0.52O3 ferroelectric films on different Pt bottom electrodes
Song, ZT
Lin, CL
[J]. APPLIED SURFACE SCIENCE, 2000, 158 (1-2) : 21 - 27
[10] Synthesis of single phase 0.9Pb[(Zn0.6Mg0.4)1/3 Nb2/3O3]-0.1PbTiO3 by mechanically activating mixed oxides
Wan, DM
Xue, JM
Wang, J
[J]. ACTA MATERIALIA, 1999, 47 (07) : 2283 - 2291

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