Accurate prediction of internal leaks in stationary dry Roots vacuum pumps

被引:19
作者
Valdés, LC
Barthod, B
Le Perron, Y
机构
[1] Univ Valenciennes, ENSIMEV, Lab Aerodynam Energet & Environm, F-59304 Valenciennes, France
[2] ALCATEL CIT, Dept Vacuum Technol, F-74009 Annecy, France
[3] ESSTIN, F-54500 Vandoeuvre Nancy, France
关键词
roots vacuum pumps; semi-empirical law; rotors;
D O I
10.1016/S0042-207X(98)00330-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
There exists a calculating method for internal leaks in dry Roots vacuum pumps. It rests upon the semi-empirical Knudsen-Dong law (Knudsen M, Ann Phys 1909;28:75; Dong W, PhD thesis, Contract no. W-7405-eng-48, University of California, 1956) describing steady rarefied gas flows in the three well-known regimes of flow; the only data input is the geometric contour of the stator and the rotors, and the pressure operating conditions. Using readings taken from a stationary dry Roots pump, it is checked that this calculating method is capable of predicting the conductance of each of the clearances to a few percent, on a pressure range widely covering the transient flow regime. (C) 1999 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码:451 / 459
页数:9
相关论文
共 7 条
  • [1] BARRETT ADS, 1944, BR296 IMP CHEM IND L
  • [2] Cercignani C., 1990, Mathematical Methods in Kinetic Theory, DOI DOI 10.1007/978-1-4899-7291-0
  • [3] Dong W., 1956, VACUUM FLOW GASES CH
  • [4] Knudsen M., 1909, ANN PHYS, V28, P75, DOI DOI 10.1002/ANDP.19093330106
  • [5] ROOTS BLOWER PERFORMANCE
    PATTERSON, J
    RITCHIE, JB
    [J]. INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 1969, 11 (07) : 575 - +
  • [6] Calculating transient flows through ducts of non-constant rectangular shape
    Valdes, LC
    Theis, R
    Barthod, B
    Desmet, B
    [J]. VACUUM, 1997, 48 (10) : 839 - 843
  • [7] von Smoluchowski M, 1910, ANN PHYS-BERLIN, V33, P1559