An optical readout method based uncooled infrared imaging system

被引:4
作者
Jiao, Binbin [2 ]
Li, Chaobo [2 ]
Chen, Dapeng [1 ,2 ]
Ye, Tianchun [2 ]
Ou, Yi [2 ]
Dong, Lijun [2 ]
Zhang, Qingchuan [3 ]
Guo, Zheying [3 ]
Dong, Fengliang [3 ]
机构
[1] Chinese Acad Sci, Inst Microelect, Silicon Device & Integrated Technol Dept, Beijing 100029, Peoples R China
[2] Chinese Acad Sci, Inst Microelect, Microproc & Nanotechnol Dept, Beijing 100029, Peoples R China
[3] Univ Sci & Technol China, Key Lab Mech Behav & Design Mat, Hefei 230027, Peoples R China
来源
INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES | 2008年 / 29卷 / 03期
基金
中国国家自然科学基金;
关键词
IR; imaging; spatial filter; opto-mechanical; uncooled;
D O I
10.1007/s10762-008-9324-2
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper presents an optical readout method based uncooled infrared imaging system that contains an optical read-out section and a bi-material micro-cantilever arrays (BMCA) detector. The optical read-out section is based on incoherent light spatial filter technique. The read-out section converts the deflection angles of BMCA caused by absorption of infrared (IR) radiation to a visible image through optical filtering operation of the BMCA with a knife-edge filter. A spatial mathematical model is presented to describe the read-out method and its validity is proved. The IR image of a person's hand obtained through the using of the 100 x 100 BMCA and the 12-bit A/D quantizer demonstrates the ability of the system to create image. The performance test shows that the average Noise-equivalent temperature difference (NETD) of the imaging system can arrive at about 183mK with some areas having a NETD as low as 78mK.
引用
收藏
页码:261 / 271
页数:11
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