Analysis of thermoelastic damping in trilayered composite microplates based on three-dimensional heat conduction

The quality factor is a key parameter of micro-electro-mechanical system resonators, and the internal friction of structural materials in the micro resonator caused by thermoelastic damping has been limiting the improvement of the quality factor. In this paper, thermoelastic damping models of trilayered composite microplates with three kinds of boundary conditions are studied. Then the convergence of thermoelastic damping with different material combinations is analyzed, and that with three kinds of boundary conditions is also analyzed. Next, the finite element model is compared with the analytical model, and the accuracy of the analytical model is verified. Finally, the effects of the coating material and the coating thickness on thermoelastic damping of micro resonators are analyzed. The results show that the Zener modulus of the coating material has a great influence on the convergence of the analytical model; the boundary condition has little effect on the convergence of the analytical model; the maximum thermoelastic damping of composite plates is related to Zener modulus of coating; the maximum thermoelastic damping of composite plates is related to the thickness of coating.