Comparison in mechanical and tribological properties of Cr-W-N and Cr-Mo-N multilayer films deposited by DC reactive magnetron sputtering

被引：59

作者：

Gu, B. ^{[1
]}

Tu, J. P. ^{[1
]}

Zheng, X. H. ^{[1
,2
]}

Yang, Y. Z. ^{[1
]}

Peng, S. M. ^{[1
]}

机构：

[1] Zhejiang Univ, Dept Mat Sci & Engn, Hangzhou 310027, Peoples R China

[2] Zhejiang Univ Technol, MOE Key Lab Mech Mfg & Automat, Hangzhou 310032, Peoples R China

来源：

SURFACE & COATINGS TECHNOLOGY | 2008年 / 202卷 / 10期

关键词：

metal nitride; multilayer; mechanical property; tribological property;

D O I：

10.1016/j.surfcoat.2007.09.006

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Cr-W-N and Cr-Mo-N films were deposited on high speed steel substrate by unbalanced DC reactive magnetron sputtering. Cross-sectional scanning electron microscopy (SEM) morphologies of the films confirmed that the bilayer thickness of multilayer became thinner, and then structural transformation occurred from multilayer to composite with increasing the rotation velocity of substrate holder. X-ray diffraction (XRD) patterns indicated that the Cr-W-N films were composed of CrN and W2N crystalline phases, and the Cr-Mo-N films consisted of crystalline CrN and arnorphous/nanocrystalline MO2N. Mechanical and tribological properties were investigated by using a nanoindentor and a ball-on-disk tribometer, respectively. The Cr-W-N films exhibited excellent mechanical properties and wear resistance, while Cr-Mo-N films showed lower fiction coefficient. Optimal mechanical and tribological properties were obtained in the Cr-W-N multilayer film with a bilayer period of 12 nm. (c) 2007 Published by Elsevier B.V.

引用

页码：2189 / 2193

页数：5

共 26 条

[1] Structural and mechanical properties of nanolayered TiAlN/CrN coatings synthesized by a cathodic arc deposition process [J].

Chang, YY ;

Wang, DY ;

Hung, CY .

SURFACE & COATINGS TECHNOLOGY, 2005, 200 (5-6) :1702-1708

[2] A combinatorial approach to the optimization of metastable multicomponent hard coatings [J].

Cremer, R ;

Neuschütz, D .

SURFACE & COATINGS TECHNOLOGY, 2001, 146 :229-236

[3] Comparison of microstructure and mechanical properties of chromium nitride-based coatings deposited by high power impulse magnetron sputtering and by the combined steered cathodic arc/unbalanced magnetron technique [J].

Ehiasarian, AP ;

Hovsepian, PE ;

Hultman, L ;

Helmersson, U .

THIN SOLID FILMS, 2004, 457 (02) :270-277

[4]

Hauert R, 2000, ADV ENG MATER, V2, P247, DOI 10.1002/(SICI)1527-2648(200005)2:5<247::AID-ADEM247>3.0.CO

[5]

2-U

[6]

Holleck H, 1995, SURF COAT TECH, V76, P328, DOI 10.1016/0257-8972(95)02555-3

[7] Mechanical properties of hard chromium tungsten nitride coatings [J].

Hones, P ;

Consiglio, R ;

Randall, N ;

Lévy, F .

SURFACE & COATINGS TECHNOLOGY, 2000, 125 (1-3) :179-184

[8] Recent progress in large scale manufacturing of multilayer/superlattice hard coatings [J].

Hovsepian, PE ;

Lewis, DB ;

Münz, WD .

SURFACE & COATINGS TECHNOLOGY, 2000, 133 :166-175

[9] Thermal stability of nitride thin films [J].

Hultman, L .

VACUUM, 2000, 57 (01) :1-30

[10] Syntheses and mechanical properties of Cr-Mo-N coatings by a hybrid coating system [J].

Kim, Kwang Ho ;

Choi, Eun Young ;

Hong, Seung Gyun ;

Park, Bong Gyu ;

Yoon, Jae Hong ;

Yong, Jeong Hae .

SURFACE & COATINGS TECHNOLOGY, 2006, 201 (07) :4068-4072

← 1 2 3 →