Numerical analysis of absorption and transmission photoacoustic spectra of silicon samples with differently treated surfaces

被引：12

作者：

Malinski, M. ^{[1
]}

Chrobak, L. ^{[1
]}

机构：

[1] Tech Univ Koszalin, Dept Elect & Comp Sci, PL-75453 Koszalin, Poland

来源：

OPTO-ELECTRONICS REVIEW | 2011年 / 19卷 / 01期

关键词：

semiconductors; silicon; photoacoustic spectroscopy; surface layer; surface quality; non-destructive testing; CRYSTALS; STATES;

D O I：

10.2478/s11772-010-0064-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents results of the photoacoustic (PA) spectral studies, of a series of silicon samples with differently prepared surfaces, in two PA experimental configurations, so-called, absorption and transmission ones. The PA amplitude spectra of the samples indicated existence of the damaged surface layers. In the paper, the two layer mathematical models of a sample with a damaged surface layer that were used for numerical interpretation of the amplitude PA spectra of the investigated samples, are presented and discussed.

引用

页码：46 / 50

页数：5

共 15 条

[1] Transmission photoacoustic spectroscopy of flash-evaporated CuIn0.75Ga0.25Se2 thin films [J].

Ahmed, E. ;

Pilkington, R. D. ;

Hill, A. E. ;

Ali, N. ;

Ahmed, W. ;

Hassan, I. U. .

THIN SOLID FILMS, 2006, 515 (01) :239-244

[2] The photoacoustic spectroscopic investigations of the surface preparation of ZnSe crystals with the use of the optimization methods [J].

Chrobak, L. ;

Malinski, M. ;

Zakrzewski, J. ;

Strzalkowski, K. .

APPLIED SURFACE SCIENCE, 2010, 256 (08) :2458-2461

[3] Transmission and absorption based photoacoustic methods of determination of the optical absorption spectra of Si samples - Comparison [J].

Chrobak, Lukasz ;

Malinski, Miroslaw .

SOLID STATE COMMUNICATIONS, 2009, 149 (39-40) :1600-1604

[4] Piezoelectric theory of detection of surface states [J].

Malinski, M. ;

Zakrzewski, J. .

EUROPEAN PHYSICAL JOURNAL-SPECIAL TOPICS, 2008, 154 (1) :345-349

[5] Photoacoustic operation modes for determination of absorption spectra of SiGe mixed crystals [J].

Malinski, M. ;

Chrobak, L. .

OPTO-ELECTRONICS REVIEW, 2010, 18 (02) :190-196

[6]

MALINSKI M, 1999, P 23 IM POL C KOL, P81

[7]

MALINSKI M, 2004, MONOGRAPH FACULTY EL, V102

[8]

Rosencwaig A., 1987, Photoacoustic and thermal wave phenomena in semiconductors, P97

[9] THEORY OF PHOTOACOUSTIC EFFECT WITH SOLIDS [J].

ROSENCWAIG, A ;

GERSHO, A .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (01) :64-69

[10] Investigation of the effects of Ar plasma etching in Si surface by photoacoustic method [J].

Todorovic, DM ;

Smiljanic, M ;

Sarajlic, M ;

Vasiljevic-Radovic, D ;

Randjelovic, D .

JOURNAL DE PHYSIQUE IV, 2005, 125 :451-453

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