Growth and characterization of Sc2O3 doped Ta2O5 thin films

被引：7

作者：

Fazio, Mariana ^{[1
,2
]}

Yang, Le ^{[3
]}

Markosyan, Ashot ^{[4
]}

Bassiri, Riccardo ^{[4
]}

Fejer, Martin M. ^{[4
]}

Menoni, Carmen S. ^{[1
,2
,3
]}

机构：

[1] Colorado State Univ, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA

[2] Colorado State Univ, NSF ERC Extreme Ultraviolet Sci & Technol, Ft Collins, CO 80523 USA

[3] Colorado State Univ, Dept Chem, Ft Collins, CO 80523 USA

[4] Stanford Univ, Ginzton Lab, Dept Appl Phys, Stanford, CA 94305 USA

来源：

APPLIED OPTICS | 2020年 / 59卷 / 05期

基金：

美国国家科学基金会;

关键词：

SC;

D O I：

10.1364/AO.59.00A106

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present the optical and structural characterization of films of Ta2O5, Sc2O3, and Sc2O3 doped Ta2O5 with a cation ratio around 0.1 grown by reactive sputtering. The addition of Sc2O3 as a dopant induces the formation of tantalum suboxide due to the "oxygen getter" property of scandium. The presence of tantalum suboxide greatly affects the optical properties of the coating, resulting in higher absorption loss at lambda = 1064 nm. The refractive index and optical band gap of the mixed film do not correspond to those of a mixture of Ta2O5 and Sc2O3, given the profound structural modifications induced by the dopant. (C) 2019 Optical Society of America

引用

页码：A106 / A111

页数：6

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