Growth and characterization of Sc2O3 doped Ta2O5 thin films

被引：7

作者：

Fazio, Mariana ^{[1
,2
]}

Yang, Le ^{[3
]}

Markosyan, Ashot ^{[4
]}

Bassiri, Riccardo ^{[4
]}

Fejer, Martin M. ^{[4
]}

Menoni, Carmen S. ^{[1
,2
,3
]}

机构：

[1] Colorado State Univ, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA

[2] Colorado State Univ, NSF ERC Extreme Ultraviolet Sci & Technol, Ft Collins, CO 80523 USA

[3] Colorado State Univ, Dept Chem, Ft Collins, CO 80523 USA

[4] Stanford Univ, Ginzton Lab, Dept Appl Phys, Stanford, CA 94305 USA

来源：

APPLIED OPTICS | 2020年 / 59卷 / 05期

基金：

美国国家科学基金会;

关键词：

SC;

D O I：

10.1364/AO.59.00A106

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present the optical and structural characterization of films of Ta2O5, Sc2O3, and Sc2O3 doped Ta2O5 with a cation ratio around 0.1 grown by reactive sputtering. The addition of Sc2O3 as a dopant induces the formation of tantalum suboxide due to the "oxygen getter" property of scandium. The presence of tantalum suboxide greatly affects the optical properties of the coating, resulting in higher absorption loss at lambda = 1064 nm. The refractive index and optical band gap of the mixed film do not correspond to those of a mixture of Ta2O5 and Sc2O3, given the profound structural modifications induced by the dopant. (C) 2019 Optical Society of America

引用

页码：A106 / A111

页数：6

共 22 条

[1] Photothermal common-path interferometry (PCI): new developments
Alexandrovski, Alexei
Fejer, Martin
Markosyan, Ashot
Route, Roger
[J]. SOLID STATE LASERS XVIII: TECHNOLOGY AND DEVICES, 2009, 7193
[2] Alig T., 2016, OPTICAL INTERFERENCE
[3] Investigation of Binary Coating Material Mixtures using Grazing Incidence EUV-Reflectometry
Balasa, I.
Neiers, X.
Mende, M.
Jensen, L.
Ristau, D.
[J]. LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2014, 2014, 9237
[4] Resolving surface chemical states in XPS analysis of first row transition metals, oxides and hydroxides: Sc, Ti, V, Cu and Zn
Biesinger, Mark C.
Lau, Leo W. M.
Gerson, Andrea R.
Smart, Roger St. C.
[J]. APPLIED SURFACE SCIENCE, 2010, 257 (03) : 887 - 898
[5] Carrier-suppressing effect of scandium in InZnO systems for solution-processed thin film transistors
Choi, Yuri
Kim, Gun Hee
Jeong, Woong Hee
Bae, Jung Hyeon
Kim, Hyun Jae
Hong, Jae-Min
Yu, Jae-Woong
[J]. APPLIED PHYSICS LETTERS, 2010, 97 (16)
[6] Oxygen "Getter" Effects on Microstructure and Carrier Transport in Low Temperature Combustion-Processed a-InXZnO (X = Ga, Sc, Y, La) Transistors
Hennek, Jonathan W.
Smith, Jeremy
Yan, Aiming
Kim, Myung-Gil
Zhao, Wei
Dravid, Vinayak P.
Facchetti, Antonio
Marks, Tobin J.
[J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2013, 135 (29) : 10729 - 10741
[7] Investigations on SiO2/HfO2 mixtures for nanosecond and femtosecond pulses
Jensen, Lars O.
Mende, Mathias
Blaschke, Holger
Ristau, Detlev
Duy Nguyen
Emmert, Luke
Rudolph, Wolfgang
[J]. LASER-INDUCED DAMAGE IN OPTICAL MATERIALS: 2010, 2010, 7842
[8] Thermal oxidation mechanism and stress evolution in Ta thin films
Jin, Yusung
Song, Jae Yong
Jeong, Soo-Hwan
Kim, Jeong Won
Lee, Tae Geol
Kim, Ju Hwang
Hahn, Junhee
[J]. JOURNAL OF MATERIALS RESEARCH, 2010, 25 (06) : 1080 - 1086
[9] Jupe M., 2007, P SOC PHOTO-OPT INS, V6720
[10] Krous E., 2010, OPTICAL INTERFERENCE

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