Large-area, uniform, high-spatial-frequency ripples generated on silicon using a nanojoule-femtosecond laser at high repetition rate

被引：109

作者：

Le Harzic, R. ^{[1
]}

Doerr, D. ^{[1
]}

Sauer, D. ^{[1
]}

Neumeier, M. ^{[2
,3
]}

Epple, M. ^{[2
,3
]}

Zimmermann, H. ^{[1
]}

Stracke, F. ^{[1
]}

机构：

[1] Fraunhofer Inst Biomed Engn IBMT, D-66386 St Ingbert, Germany

[2] Univ Duisburg Essen, Inst Inorgan Chem, D-45117 Essen, Germany

[3] Univ Duisburg Essen, Ctr Nanointegrat Duisburg Essen CeNIDE, D-45117 Essen, Germany

来源：

OPTICS LETTERS | 2011年 / 36卷 / 02期

基金：

美国国家科学基金会;

关键词：

PERIODIC SURFACE-STRUCTURE; PULSES; FILM; NANOPARTICLES;

D O I：

10.1364/OL.36.000229

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Large-area high-spatial-frequency patterns (HSFLs) of lambda/6 periodicity have been generated by a nanojoule-femtosecond laser scanning technique (80 MHz, 170 fs, 700-950 nm) at the silicon-air interface. The excellent large-area uniformity allowed reproducible and accurate measurements of the periodicity. Variation of experimental parameters as illumination geometry, and pulse energy and number showed no influence on the ripple spacing. A wavelength dependence was observed and compared to current models of HSFL formation. A particular second-armonic model was found to match the results best but needs to take into account transient changes in the refractive index under laser exposure. A second-harmonic mechanism is further supported by direct spectroscopic observation. (C) 2011 Optical Society of America

引用

页码：229 / 231

页数：3

共 15 条

[1] On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses [J].

Bonse, Joern ;

Rosenfeld, Arkadi ;

Krueger, Joerg .

JOURNAL OF APPLIED PHYSICS, 2009, 106 (10)

[2] Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses [J].

Borowiec, A ;

Haugen, HK .

APPLIED PHYSICS LETTERS, 2003, 82 (25) :4462-4464

[3] Surface patterning on insulators upon femtosecond laser ablation [J].

Costache, F ;

Henyk, M ;

Reif, J .

APPLIED SURFACE SCIENCE, 2003, 208 :486-491

[4] Femtosecond laser interaction with silicon under water confinement [J].

Daminelli, G ;

Krüger, J ;

Kautek, W .

THIN SOLID FILMS, 2004, 467 (1-2) :334-341

[5] Coulomb explosion-induced formation of highly oriented nanoparticles on thin films of 3C-SiC by the femtosecond pulsed laser [J].

Dong, YY ;

Molian, P .

APPLIED PHYSICS LETTERS, 2004, 84 (01) :10-12

[6] Femtosecond laser-induced periodic surface structures revisited: A comparative study on ZnO [J].

Dufft, D. ;

Rosenfeld, A. ;

Das, S. K. ;

Grunwald, R. ;

Bonse, J. .

JOURNAL OF APPLIED PHYSICS, 2009, 105 (03)

[7] THE TEMPERATURE-DEPENDENCE OF THE REFRACTIVE-INDEX OF SILICON AT ELEVATED-TEMPERATURES AT SEVERAL LASER WAVELENGTHS [J].

JELLISON, GE ;

BURKE, HH .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) :841-843

[8] Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses [J].

Jia, TQ ;

Chen, HX ;

Huang, M ;

Zhao, FL ;

Qiu, JR ;

Li, RX ;

Xu, ZZ ;

He, XK ;

Zhang, J ;

Kuroda, H .

PHYSICAL REVIEW B, 2005, 72 (12)

[9] Sub-100 nm nanostructuring of silicon by ultrashort laser pulses [J].

Le Harzic, R ;

Schuck, H ;

Sauer, D ;

Anhut, T ;

Riemann, I ;

König, K .

OPTICS EXPRESS, 2005, 13 (17) :6651-6656

[10] Origin of periodicity in nanostructuring on thin film surfaces ablated with femtosecond laser pulses [J].

Miyaji, Godai ;

Miyazaki, Kenzo .

OPTICS EXPRESS, 2008, 16 (20) :16265-16271

← 1 2 →