An adaptive non-raster scanning method in atomic force microscopy for simple sample shapes

被引:13
|
作者
Zhang, Kaiqiang [1 ]
Hatano, Toshiaki [1 ]
Thang Tien [2 ]
Herrmann, Guido [1 ]
Edwards, Christopher [2 ]
Burgess, Stuart C. [1 ]
Miles, Mervyn [3 ]
机构
[1] Univ Bristol, Dept Mech Engn, Bristol BS8 1TR, Avon, England
[2] Univ Exeter, Dept Engn, Exeter EX4 4QJ, Devon, England
[3] Univ Bristol, Sch Phys, Bristol BS8 1TH, Avon, England
基金
英国工程与自然科学研究理事会;
关键词
non-raster scanning; atomic force microscopy; boundary contour scan; contour prediction; image interpolation; DYNAMICS; TRACKING;
D O I
10.1088/0957-0233/26/3/035401
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
It is a significant challenge to reduce the scanning time in atomic force microscopy while retaining imaging quality. In this paper, a novel non-raster scanning method for high-speed imaging is presented. The method proposed here is developed for a specimen with the simple shape of a cell. The image is obtained by scanning the boundary of the specimen at successively increasing heights, creating a set of contours. The scanning speed is increased by employing a combined prediction algorithm, using a weighted prediction from the contours scanned earlier, and from the currently scanned contour. In addition, an adaptive change in the height step after each contour scan is suggested. A rigorous simulation test bed recreates the x-y specimen stage dynamics and the cantilever height control dynamics, so that a detailed parametric comparison of the scanning algorithms is possible. The data from different scanning algorithms are compared after the application of an image interpolation algorithm (the Delaunay interpolation algorithm), which can also run on-line.
引用
收藏
页数:12
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