Self-consistent simulation of radio-frequency discharge in Ar-SiH4 with strong dust contamination

被引：0
|
作者：
Schweigert, V [1 ]
Alexandrov, A [1 ]
机构：
[1] RAS, Inst Theoret & Appl Mech, Novosibirsk, Russia
来源：
INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GAS, VOL I, PROCEEDINGS | 1999年
关键词：
D O I：
暂无
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
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页码：195 / 196
页数：2
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