Emission properties of carbon nanowalls on porous silicon

被引:12
作者
Evlashin, Stanislav A. [1 ]
Mankelevich, Yuri A. [1 ]
Borisov, Vladimir V. [1 ]
Pilevskii, Andrey A. [1 ]
Stepanov, Anton S. [1 ]
Krivchenko, Victor A. [1 ]
Suetin, Nikolai V. [1 ]
Rakhimov, Alexander T. [1 ]
机构
[1] Moscow MV Lomonosov State Univ, Skobeltsyn Inst Nucl Phys, Moscow 119991, Russia
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2012年 / 30卷 / 02期
关键词
FIELD-EMISSION; RAMAN-SPECTROSCOPY; EMITTERS; GROWTH; FILM;
D O I
10.1116/1.3681287
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
For the past two decades various methods of carbon nanostructures growth have been proposed. Special substrate pretreatment methods are generally used to grow carbon nanowalls on silicon substrates and among them are mechanical and catalytic methods and ion bombardment in an rf discharge with bias. This work describes the possibility of growing carbon structures on porous silicon in a dc discharge without any additional pretreatment of the substrate surface. Carbon structures were grown on n- and p-type (100) porous silicon substrates produced by using standard photoelectrochemical etching. The analysis of these carbon structures revealed nanocrystalline carbon with multilayer carbon nanotubes and fibers. All samples demonstrated low field emission thresholds (E-tr < 3 V/mu m) and high current densities, showing an achieved current density of more than 6 A/cm(2) for an electric field of E similar to 15 V/mu m. The authors investigated various modifications of porous silicon samples and carbon structures and demonstrated a practicable technique to create a reproducible uniform spot that varies in size from several millimeters to tens of millimeters. The authors propose a simplified and less expensive alternative to existing methods. (C) 2012 American Vacuum Society. [DOI: 10.1116/1.3681287]
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页数:6
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