Laser-induced chemical liquid phase deposition of metals: chemical reactions in solution and activation of dielectric surfaces

被引:31
作者
Kochemirovsky, V. A. [1 ]
Menchikov, L. G. [2 ]
Safonov, S. V. [1 ]
Bal'makov, M. D. [1 ]
Tumkin, I. I. [1 ]
Tver'yanovich, Yu S. [1 ]
机构
[1] St Petersburg State Univ, Dept Chem, St Petersburg 198504, Russia
[2] Russian Acad Sci, ND Zelinsky Inst Organ Chem, Moscow 119991, Russia
关键词
COPPER DEPOSITION; EXCIMER-LASER; ASSISTED ACTIVATION; ORGANIC SOLUTIONS; GOLD DEPOSITION; YAG LASER; METALLIZATION; POLYIMIDE; PRECURSORS; POLYMERS;
D O I
10.1070/RC2011v080n09ABEH004224
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Data on the factors affecting the result of laser-induced chemical liquid phase deposition of metals, first of all copper, are generalized and described systematically. The attention is focused on the chemical reactions in solution and activation of dielectric surfaces. The mechanisms of chemical and laser-induced deposition of local copper structures from solution onto dielectric surface are considered. The effect of the solution components on the result of deposition is discussed. The bibliography includes 92 references.
引用
收藏
页码:869 / 882
页数:14
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