Effect of the magnetic field on the plasma parameters in the cathode fall region of the DC-glow discharge

被引:12
作者
Hassouba, MA [1 ]
机构
[1] Benha Univ, Fac Sci, Dept Phys, Benha, Egypt
关键词
D O I
10.1051/epjap:2001148
中图分类号
O59 [应用物理学];
学科分类号
摘要
Low-density plasma is generated in a cylindrical DC magnetron discharge tube. Distribution of the magnetic field strengths in the radial and axial directions is drawn. Langmuir probe data are obtained at the edge of the cathode fall region of Ar gas discharge at pressure range from 0.5 to 4.0 torr. In the presence of the magnetic field, values of the electron temperature T-e are smaller than that without magnetic field. While plasma density N-e increases by a factor of two than that without magnetic field. The electron density increases with magnetic field due to electron magnetic confinement. Also, the radial distribution of T-e and N-e in the cathode fall region of the glow discharge is discussed. The magnetic field drift velocity plays an important role to make the radial distribution of T-e and N-e slightly changed.
引用
收藏
页码:131 / 135
页数:5
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