Recent Researches in Micro Electrical Machining

被引：81

作者：

Chung, Do Kwan ^{[1
]}

Shin, Hong Shik ^{[1
]}

Park, Min Soo ^{[2
]}

Kim, Bo Hyun ^{[3
]}

Chu, Chong Nam ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Mech & Aerosp Engn, Seoul 151742, South Korea

[2] Seoul Natl Univ Sci & Technol, Dept Prod Design & Mfg Eng, Seoul 139743, South Korea

[3] Soongsil Univ, Dept Mech Engn, Seoul 156743, South Korea

来源：

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING | 2011年 / 12卷 / 02期

关键词：

Micro electrical machining; Micro EDM; Micro ECM; Micro ECDM; Electrochemical etching; Hybrid machining; HIGH-ASPECT-RATIO; STEEL SHADOW MASK; STAINLESS-STEEL; FUNDAMENTAL-ASPECTS; FABRICATION; ELECTRODES; WATER; GLASS; HOLE; FILM;

D O I：

10.1007/s12541-011-0049-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The demand for micro parts and moulds has been increasing in various fields. Among the various micro machining technologies, micro electrical machining is one of the most widely used because it can be applied for conductive or non-conductive materials. This paper discusses the recent studies that explore many ways to improve micro electrical machining performance. Many researchers proposed ways to improve productivity and accuracy through experimental or analytical studies. The improved-performance trends of micro electrical machining are expected to continue thanks to the miniaturization of manufactured goods in a high-tech industry

引用

页码：371 / 380

页数：10

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