Fully Printed High-Performance n-Type Metal Oxide Thin-Film Transistors Utilizing Coffee-Ring Effect

被引:39
|
作者
Liang, Kun [1 ,2 ]
Li, Dingwei [1 ,2 ]
Ren, Huihui [1 ,2 ]
Zhao, Momo [1 ,3 ]
Wang, Hong [3 ,4 ]
Ding, Mengfan [4 ]
Xu, Guangwei [4 ]
Zhao, Xiaolong [4 ]
Long, Shibing [4 ,5 ]
Zhu, Siyuan [5 ]
Sheng, Pei [5 ]
Li, Wenbin [1 ,6 ]
Lin, Xiao [6 ,7 ]
Zhu, Bowen [1 ,6 ]
机构
[1] Westlake Univ, Sch Engn, Key Lab 3D Micro Nano Fabricat & Characterizat Zh, Hangzhou 310024, Peoples R China
[2] Zhejiang Univ, Hangzhou 310027, Peoples R China
[3] Xidian Univ, Sch Microelect, Key Lab Wide Band Gap Semicond Technol, Xian 710071, Peoples R China
[4] Univ Sci & Technol China, Sch Microelect, Hefei 230026, Peoples R China
[5] Westlake Univ, Instrumentat & Serv Ctr Phys Sci, Hangzhou 310024, Peoples R China
[6] Westlake Inst Adv Study, Inst Adv Technol, Hangzhou 310024, Peoples R China
[7] Westlake Univ, Sch Sci, Hangzhou 310024, Peoples R China
关键词
Printed electronics; Indium tin oxide; Thin-film transistors; Coffee-ring effect; NMOS inverters; TEMPERATURE FABRICATION; SUPPRESSION; ELECTRONICS; POWER;
D O I
10.1007/s40820-021-00694-4
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Metal oxide thin-films transistors (TFTs) produced from solution-based printing techniques can lead to large-area electronics with low cost. However, the performance of current printed devices is inferior to those from vacuum-based methods due to poor film uniformity induced by the "coffee-ring" effect. Here, we report a novel approach to print high-performance indium tin oxide (ITO)-based TFTs and logic inverters by taking advantage of such notorious effect. ITO has high electrical conductivity and is generally used as an electrode material. However, by reducing the film thickness down to nanometers scale, the carrier concentration of ITO can be effectively reduced to enable new applications as active channels in transistors. The ultrathin (similar to 10-nm-thick) ITO film in the center of the coffee-ring worked as semiconducting channels, while the thick ITO ridges (>18-nm-thick) served as the contact electrodes. The fully inkjet-printed ITO TFTs exhibited a high saturation mobility of 34.9 cm(2) V-1 s(-1) and a low subthreshold swing of 105 mV dec(-1). In addition, the devices exhibited excellent electrical stability under positive bias illumination stress (PBIS, Delta V-th = 0.31 V) and negative bias illuminaiton stress (NBIS, Delta V-th = -0.29 V) after 10,000 s voltage bias tests. More remarkably, fully printed n-type metal-oxide-semiconductor (NMOS) inverter based on ITO TFTs exhibited an extremely high gain of 181 at a low-supply voltage of 3 V, promising for advanced electronics applications.
引用
收藏
页数:11
相关论文
共 50 条
  • [1] Fully Printed High-Performance n-Type Metal Oxide Thin-Film Transistors Utilizing Coffee-Ring Effect
    Kun Liang
    Dingwei Li
    Huihui Ren
    Momo Zhao
    Hong Wang
    Mengfan Ding
    Guangwei Xu
    Xiaolong Zhao
    Shibing Long
    Siyuan Zhu
    Pei Sheng
    Wenbin Li
    Xiao Lin
    Bowen Zhu
    Nano-Micro Letters, 2021, 13
  • [2] Fully Printed High-Performance n-Type Metal Oxide Thin-Film Transistors Utilizing Coffee-Ring Effect
    Kun Liang
    Dingwei Li
    Huihui Ren
    Momo Zhao
    Hong Wang
    Mengfan Ding
    Guangwei Xu
    Xiaolong Zhao
    Shibing Long
    Siyuan Zhu
    Pei Sheng
    Wenbin Li
    Xiao Lin
    Bowen Zhu
    Nano-Micro Letters, 2021, 13 (11) : 76 - 86
  • [3] Coffee-Ring Defined Short Channels for Inkjet-Printed Metal Oxide Thin-Film Transistors
    Li, Yuzhi
    Lan, Linfeng
    Xiao, Peng
    Sun, Sheng
    Lin, Zhenguo
    Song, Wei
    Song, Erlong
    Gao, Peixiong
    Wu, Weijing
    Peng, Junbiao
    ACS APPLIED MATERIALS & INTERFACES, 2016, 8 (30) : 19643 - 19648
  • [4] Fully-printed flexible n-type tin oxide thin-film transistors and logic circuits
    Liang, Kun
    Ren, Huihui
    Li, Dingwei
    Wang, Yan
    Tang, Yingjie
    Zhao, Momo
    Wang, Hong
    Li, Wenbin
    Zhu, Bowen
    Journal of Materials Chemistry C, 2021, 9 (35): : 11662 - 11668
  • [5] Fully-printed flexible n-type tin oxide thin-film transistors and logic circuits
    Liang, Kun
    Ren, Huihui
    Li, Dingwei
    Wang, Yan
    Tang, Yingjie
    Zhao, Momo
    Wang, Hong
    Li, Wenbin
    Zhu, Bowen
    JOURNAL OF MATERIALS CHEMISTRY C, 2021, 9 (35) : 11662 - 11668
  • [6] High-performance transparent inorganic–organic hybrid thin-film n-type transistors
    Lian Wang
    Myung-Han Yoon
    Gang Lu
    Yu Yang
    Antonio Facchetti
    Tobin J. Marks
    Nature Materials, 2006, 5 : 893 - 900
  • [7] Erratum: High-performance transparent inorganic–organic hybrid thin-film n-type transistors
    Lian Wang
    Myung-Han Yoon
    Gang Lu
    Yu yang
    Antonio Facchetti
    Tobin J. Marks
    Nature Materials, 2007, 6 : 317 - 317
  • [8] High-performance transparent inorganic-organic hybrid thin-film n-type transistors
    Wang, Lian
    Yoon, Myung-Han
    Lu, Gang
    Yang, Yu
    Facchetti, Antonio
    Marks, Tobin J.
    NATURE MATERIALS, 2006, 5 (11) : 893 - 900
  • [9] High-performance organic thin-film transistors with metal oxide/metal bilayer electrode
    Chu, CW
    Li, SH
    Chen, CW
    Shrotriya, V
    Yang, Y
    APPLIED PHYSICS LETTERS, 2005, 87 (19) : 1 - 3
  • [10] Submicron Channel Length High-Performance Metal Oxide Thin-Film Transistors
    Sung, Chihun
    Nam, Sooji
    Cho, Sung Haeng
    IEEE ELECTRON DEVICE LETTERS, 2021, 42 (09) : 1327 - 1330