Formation of ZrO2 cubic phase microcrystals during crystallization of amorphous films deposited by laser ablation of Zr in an oxygen atmosphere

被引：4

作者：

Bagmut, A. G. ^{[1
]}

Bagmut, I. A. ^{[1
]}

Reznik, N. A. ^{[1
]}

机构：

[1] Natl Tech Univ Kharkiv Polytech Inst, St Frunze 21, UA-61002 Kharkov, Ukraine

来源：

PHYSICS OF THE SOLID STATE | 2016年 / 58卷 / 06期

关键词：

D O I：

10.1134/S1063783416060056

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The structure and phase transformations during annealing of zirconium dioxide films grown by pulsed laser sputtering of a Zr target in an oxygen atmosphere have been studied by transmission electron microscopy and electron diffraction methods. The conditions of the formation of both amorphous and cubic ZrO2 phases have been determined. The electron beam impact on the amorphous film in vacuum is accompanied by the formation of zirconium dioxide microcrystals with fcc lattice. The average grain size in the crystallized film is similar to 0.5 mu m. The phase transformation is accompanied by film material densification. The relative change in the density during ZrO2 crystallization is 10.27 +/- 2.14%.

引用

页码：1262 / 1265

页数：4

共 6 条

[1]

Bagmut A., 2014, ELECT MICROSCOPY FIL

[2] Phase transformations in films deposited by laser ablation of Hf in an oxygen Atmosphere [J].

Bagmut, A. G. ;

Bagmut, I. A. ;

Zhuchkov, V. A. ;

Shevchenko, M. O. .

TECHNICAL PHYSICS, 2012, 57 (06) :856-860

[3] Dispersion of Zirconium Dioxide by Pulsed Laser Radiation [J].

Pugachevskii, M. A. ;

Zavodinskii, V. G. ;

Kuz'menko, A. P. .

TECHNICAL PHYSICS, 2011, 56 (02) :254-258

[4] Influence of Hf→Zr substitution on optical and refractometric parameters of Hf1-xZrxO2 thin films [J].

Studenyak, IP ;

Kranjcec, A ;

Nahusko, OT ;

Borets, OM .

THIN SOLID FILMS, 2005, 476 (01) :137-141

[5] Influence of the Oxygen Concentration on the Formation of Crystalline Phases of ZrO2 Nanoparticles during the Low-Pressure Arc-Discharge Plasma Synthesis [J].

Ushakov, A. V. ;

Karpov, I. V. ;

Lepeshev, A. A. .

PHYSICS OF THE SOLID STATE, 2015, 57 (11) :2320-2322

[6] Stability of cubic zirconia and of stoichiometric zirconia nanoparticles [J].

Zavodinsky, VG ;

Chibisov, AN .

PHYSICS OF THE SOLID STATE, 2006, 48 (02) :363-368

← 1 →