Fabrication of MEMS-based Micro-fluxgate Sensor with Runway-shaped Co-based Amorphous Alloy Core

被引：6

作者：

Wu, Shaobin ^{[1
]}

Chen, Shi ^{[1
]}

Ouyang, Jun ^{[1
]}

Zuo, Chao ^{[1
]}

Yu, Lei ^{[1
]}

Yang, Xiaofei ^{[1
]}

机构：

[1] Huazhong Univ Sci & Technol, Dept Elect Sci & Technol, Wuhan 430074, Peoples R China

来源：

1ST INTERNATIONAL SYMPOSIUM ON SPINTRONIC DEVICES AND COMMERCIALIZATION (ISSDC2010) | 2011年 / 263卷

关键词：

D O I：

10.1088/1742-6596/263/1/012012

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High-precision magnetic micro-sensor is an interdisciplinary subject of magnetic field measurement techniques and micro-electromechanical systems (MEMS) technology. A micro-fluxgate magnetic sensor based MEMS technology was designed and fabricated in this paper. This device is a micro-magnetic sensor with a symmetric construction, closed magnetic circuits and differential form. A 25 mu m thick Fluxgate core of runway model, made by Co-based amorphous alloy, was etched by laser and pasted on the substrate accurately. Excitation coil and sensing coil of 3D solenoid structure were prepared by RF magnetron sputtering and UV-lithography. The minimum line width of the coil is 50 mu m. The experimental result shows that micro-fluxgate devices with the size of 5.7mmx7.1mmx60 mu m had a stable structure.

引用

页数：6

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