Micromachined piezoelectric force sensors based on PZT thin films

被引：77
|
作者：
Lee, CK
Itoh, T
Suga, T
机构：
[1] Nanometer-Scale Manufacturing Science Laboratory, Research Center for Advanced Science and Technology, University of Tokyo
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 1996年 / 43卷 / 04期
关键词：
D O I：
10.1109/58.503715
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A micromachined lead zirconate titanate (PZT) force sensor for scanning force microscope (SFM) is conceptualized by its piezoelectricity. The fabrication procedure is interpreted, and mechanical characteristics bf the micromachined PZT force sensors with various lengths are studied-in this paper. A compact SFM is constructed by using the piezoelectric PZT sensor. A very clear image is able to bk taken by this SFM. The current study of the micromachined PZT force sensor can be considered as a breakthrough of design of SFM as well as a good example of integrated piezoelectric microdevices.
引用
收藏
页码：553 / 559
页数：7
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