Three-Dimensional Scanning Electron Microscopy of Surface Topography with Consideration of the Effect of the Response Function of the Detector System

被引：0

作者：

Borzunov, A. A. ^{[1
]}

Zabrodsky, V. V. ^{[2
]}

Zaitsev, S. V. ^{[1
]}

Karaulov, V. Y. ^{[1
]}

Lukyanenko, D. V. ^{[1
,3
]}

Rau, E. I. ^{[1
]}

Sherstnev, E. V. ^{[2
]}

Yagola, A. G. ^{[1
]}

机构：

[1] Lomonosov Moscow State Univ, Dept Phys, Moscow 119992, Russia

[2] Russian Acad Sci, Inst Phys & Technol, St Petersburg 194021, Russia

[3] Moscow Ctr Fundamental & Appl Math, Moscow 119234, Russia

来源：

MOSCOW UNIVERSITY PHYSICS BULLETIN | 2021年 / 76卷 / 04期

关键词：

scanning electron microscopy; back-scattered electrons; 3D surface topography reconstruction; inclination angle; detector response function; SEM;

D O I：

10.3103/S0027134921040044

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

An experimental system for detection of back-scattered electrons (BSE) in the scanning electron microscope (SEM) for three-dimensional (3D) visualization of the microstructure topography is described. The 3D surface topography reconstruction is carried out according to the algorithm of profile reconstruction from the preliminarily determined angular dependencies of BSE with the use of a calibration specimen. It is shown that the instrument function of the detector system, i.e., the detector response function, as well as the geometric factor, that takes the transformation of the angle distribution for single and multiple scattering of BSEs into consideration, cause a significant impact on the detected signal.

引用

页码：209 / 214

页数：6

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