Effects of Transverse Magnetic Field on Thermal Fluctuations in the Melt of a Cz-Si Crystal Growth

被引：1
作者：
Liu, Xin [1 ]
Liu, Lijun [1 ]
Wang, Yuan [1 ]
机构：
[1] Xi An Jiao Tong Univ, Sch Energy & Power Engn, Xian 710049, Shaanxi, Peoples R China
来源：
CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2011 (CSTIC 2011) | 2011年 / 34卷 / 01期
关键词：
SILICON MELT; FLOW; SIMULATION; CONVECTION; MODEL;
D O I：
10.1149/1.3567724
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Three dimensional (3D) unsteady computations were carried out to understand the effects of transverse magnetic field (TMF) on thermal fluctuations in the melt of a 300 mm Cz-Si crystal growth. A developed LES program with the dynamic SGS model was employed to predict the melt turbulence with or without TMF. The effects of TMF on statistical behaviors of the melt convection were studied. It was found that the thermal fluctuations in the crystallization zone decreased significantly when the TMF was applied. This indicates that the TMF can suppress the flow instability in the melt of the Cz-Si crystal growth.
引用
收藏
页码：1123 / 1128
页数：6
相关论文
共 16 条
  • [1] Numerical study of 3D unsteady melt convection during indu strial-scale CZ Si-crystal growth
    Evstratov, IY
    Kalaev, VV
    Zhmakin, AI
    Makarov, YN
    Abramov, AG
    Ivanov, NG
    Korsakov, AB
    Smirnov, EM
    Dornberger, E
    Virbulis, J
    Tomzig, E
    von Ammon, W
    [J]. JOURNAL OF CRYSTAL GROWTH, 2002, 237 (1-4 III) : 1757 - 1761
  • [2] Modeling analysis of unsteady three-dimensional turbulent melt flow during Czochralski growth of Si crystals
    Evstratov, IY
    Kalaev, VV
    Zhmakin, AI
    Makarov, YN
    Abramov, AG
    Ivanov, NG
    Smirnov, EM
    Dornberger, E
    Virbulis, J
    Tomzig, E
    von Ammon, W
    [J]. JOURNAL OF CRYSTAL GROWTH, 2001, 230 (1-2) : 22 - 29
  • [3] A DYNAMIC SUBGRID-SCALE EDDY VISCOSITY MODEL
    GERMANO, M
    PIOMELLI, U
    MOIN, P
    CABOT, WH
    [J]. PHYSICS OF FLUIDS A-FLUID DYNAMICS, 1991, 3 (07): : 1760 - 1765
  • [4] Analysis of magnetic field effect on 3D melt flow in CZ Si growth
    Ivanov, NG
    Korsakov, AB
    Smirnov, EM
    Khodosevitch, KV
    Kalaev, VV
    Makarov, YN
    Dornberger, E
    Virbulis, J
    von Ammon, W
    [J]. JOURNAL OF CRYSTAL GROWTH, 2003, 250 (1-2) : 183 - 188
  • [5] Investigation of the cylinder separated shear-layer physics by large-eddy simulation
    Jordan, SA
    [J]. INTERNATIONAL JOURNAL OF HEAT AND FLUID FLOW, 2002, 23 (01) : 1 - 12
  • [6] Oxygen distribution in silicon melt under inhomogeneous transverse-magnetic fields
    Kakimoto, K
    [J]. JOURNAL OF CRYSTAL GROWTH, 2001, 230 (1-2) : 100 - 107
  • [7] Geostrophic turbulence in CZ silicon crucible
    Kishida, Y
    Okazawa, K
    [J]. JOURNAL OF CRYSTAL GROWTH, 1999, 198 : 135 - 140
  • [8] Numerical 3D modelling of turbulent melt flow in large CZ system with horizontal DC magnetic field-I:: flow structure analysis
    Krauze, A
    Muiznieks, A
    Mülbauer, A
    Wetzel, T
    von Ammon, W
    [J]. JOURNAL OF CRYSTAL GROWTH, 2004, 262 (1-4) : 157 - 167
  • [9] A PROPOSED MODIFICATION OF THE GERMANO-SUBGRID-SCALE CLOSURE METHOD
    LILLY, DK
    [J]. PHYSICS OF FLUIDS A-FLUID DYNAMICS, 1992, 4 (03): : 633 - 635
  • [10] Partly three-dimensional global modeling of a silicon Czochralski furnace. I. Principles, formulation and implementation of the model
    Liu, LJ
    Kakimoto, K
    [J]. INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER, 2005, 48 (21-22) : 4481 - 4491
12