共 50 条
- [22] Stripping of photoresist using a remote thermal Ar/O2 and Ar/N2/O2 plasma JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (01): : 61 - 66
- [23] Decomposition of N2O by microwave discharge of N2O/He or N2O/Ar mixtures JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (12): : 7091 - 7097
- [25] Electron density measurement of Ar, N2, O2, and Ar mixtures (with N2 and O2) gas in inductively coupled plasma (ICP) using terahertz time domain spectroscopy OPTICS AND LASER TECHNOLOGY, 2025, 180
- [26] ENERGY DEPENDENCES OF THE REACTIONS OF AR+ WITH H-2, N2, CO, O2, CO2, N2O, AND COS JOURNAL OF CHEMICAL PHYSICS, 1982, 76 (10): : 4972 - 4977
- [28] Electrical characterization of RF sputtered tantalum oxide films rapid thermal annealed with Ar, N2, O2 and N2O Thin Solid Films, (105-107):
- [30] AN INVESTIGATION OF THE INTERACTION OF POLYCRYSTALLINE ZIRCONIUM WITH O2, N2, CO, AND N2O .1. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (04): : 1837 - 1842