Rapid directed assembly of block copolymer films at elevated temperatures

被引:149
作者
Welander, Adam M. [1 ]
Kang, Huiman [1 ]
Stuen, Karl O. [1 ]
Solak, Harun H. [2 ]
Mueller, Marcus [3 ]
de Pablo, Juan J. [1 ]
Nealey, Paul F. [1 ]
机构
[1] Univ Wisconsin, Dept Chem & Biol Engn, Madison, WI 53706 USA
[2] Paul Scherrer Inst, Lab Micro & Nanotechnol, Villigen, Switzerland
[3] Univ Gottingen, Inst Theoret Phys, D-37077 Gottingen, Germany
关键词
D O I
10.1021/ma800056s
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
A study was conducted, to demonstrate that the time required for assembling block copolymer films was related to polymer diffusivity. The study also demonstrated that the mobility at accessible temperature was such that the directed assembly of useful morphologies can occur quickly. Chemical nanopatterns were used, to direct the assembly of the block copolymer domains into parallel lines of arbitary length. The study used extreme ultraviolet interference lithography, to create the chemical nano patterns. Thin films of 55 nm thick PS-b-PMMA were also deposited and annealed on a hot plate in a nitrogen glovebox for periods, ranging between 1 minute to 3 hours, to conduct the study. Samples were annealed at discrete time intervals, classifying as with or without defects from representative scanning electron microscopic (SEM) images, to quantify the effect of temperature on the time frame required for assembly.
引用
收藏
页码:2759 / 2761
页数:3
相关论文
共 37 条
[1]   NEUTRON REFLECTIVITY STUDIES OF THE SURFACE-INDUCED ORDERING OF DIBLOCK COPOLYMER FILMS [J].
ANASTASIADIS, SH ;
RUSSELL, TP ;
SATIJA, SK ;
MAJKRZAK, CF .
PHYSICAL REVIEW LETTERS, 1989, 62 (16) :1852-1855
[2]  
Bird RB, 1987, DYNAMICS POLYM LIQUI
[3]   Polymer self assembly in semiconductor microelectronics [J].
Black, C. T. ;
Ruiz, R. ;
Breyta, G. ;
Cheng, J. Y. ;
Colburn, M. E. ;
Guarini, K. W. ;
Kim, H.-C. ;
Zhang, Y. .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 2007, 51 (05) :605-633
[4]   Integration of self-assembled diblock copolymers for semiconductor capacitor fabrication [J].
Black, CT ;
Guarini, KW ;
Milkove, KR ;
Baker, SM ;
Russell, TP ;
Tuominen, MT .
APPLIED PHYSICS LETTERS, 2001, 79 (03) :409-411
[5]   Nanometer-scale pattern registration and alignment by directed diblock copolymer self-assembly [J].
Black, CT ;
Bezencenet, O .
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2004, 3 (03) :412-415
[6]   Structure and dynamics of disordered tetrablock copolymers: Composition and temperature dependence of local friction [J].
Chapman, BR ;
Hamersky, MW ;
Milhaupt, JM ;
Kostelecky, C ;
Lodge, TP ;
von Meerwall, ED ;
Smith, SD .
MACROMOLECULES, 1998, 31 (14) :4562-4573
[7]  
Cheng JY, 2001, ADV MATER, V13, P1174, DOI 10.1002/1521-4095(200108)13:15<1174::AID-ADMA1174>3.0.CO
[8]  
2-Q
[9]   DIFFUSION IN MICROSTRUCTURED BLOCK-COPOLYMERS - CHAIN LOCALIZATION AND ENTANGLEMENTS [J].
DALVI, MC ;
EASTMAN, CE ;
LODGE, TP .
PHYSICAL REVIEW LETTERS, 1993, 71 (16) :2591-2594
[10]  
EDWARDS EW, 2004, ADV MATER, V16, DOI UNSP 1315000