Mems sensor for in situ TEM Atomic Force Microscopy

被引：0

作者：

Nafari, A. ^{[1
]}

Karlen, D. ^{[1
]}

Rusu, C. ^{[2
]}

Svensson, K. ^{[4
]}

Olin, H. ^{[3
]}

Enoksson, P. ^{[1
,5
]}

机构：

[1] Chalmers Univ Technol, MC2, Stockholm, Sweden

[2] Kyowa Hakko Kogyo Co Ltd, Pharmaceut Res Labs, Nagaizumi, Shizuoka 411, Japan

[3] Mid Sweden Univ, Sundsvall 85170, Sweden

[4] Karlstad Univ, Dept Phys, Karlstad, Sweden

[5] Chalmers Univ, Gothenburg, Sweden

来源：

PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, VOLS 1 AND 2 | 2007年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Here we present a MEMS Atomic Force Microscope (AFM) sensor for use inside a Transmission Electron Microscope (TEM). This enables direct in situ TEM force measurements in the nN range. The main design challenges of the sensor are a high sensitivity and the narrow dimensions of the pole gap inside the TEM. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We present in situ TEM force measurements on nanotubes, which demonstrates the ability to measure spring constants of nanoscale systems.

引用

页码：294 / +

页数：2

共 9 条

[1] Force interactions and adhesion of gold contacts using a combined atomic force microscope and transmission electron microscope [J].