Investigation on the Optical Properties of Sulfur-doped Diamond Thin Films

被引：0

作者：

Wang, Yongjie ^{[1
]}

Zhao, Qingxun ^{[2
]}

Yin, Zengqian ^{[1
]}

Zhao, Zhanlong ^{[1
]}

机构：

[1] N China Elect Power Univ, Coll Math & Phys, Baoding 071003, Peoples R China

[2] Hebei Univ, Coll Phys Sci & Technol, 071002 Baoding, Peoples R China

来源：

INTERNATIONAL SYMPOSIUM ON PHOTOELECTRONIC DETECTION AND IMAGING 2011: ADVANCES IN INFRARED IMAGING AND APPLICATIONS | 2011年 / 8193卷

关键词：

Diamond; Sulfur-doped; Raman spectra; CVD; GROWTH;

D O I：

10.1117/12.900241

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Sulfur-doped diamond thin films have been synthesized using CH4/H-2/Ar/H2S gas mixture by hot filament chemical vapor deposition (HFCVD) technique. The optical properties of the films are investigated by SEM and Raman spectra. The Gaussian line shape is used in the curve fitting for the Raman spectra. Results show that the I-D/I-G presents the trend of first increase and then decrease with the increase of S/C ratio, however, an upward shift of the diamond peak is observed. This implies residual stress in the sulfur-doped diamond thin films. Moreover, optimum experimental conditions are proposed.

引用

页数：5

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