Initial nucleation scheme of Ga2O3 on (0001) sapphire by mist CVD for the growth of α-phase (vol 60, 055501, 2021)

被引：0
|
作者：
Takane, Hitoshi [1 ]
Kaneko, Kentaro [1 ,2 ,3 ]
Ota, Yuichi [4 ]
Fujita, Shizuo [1 ,3 ]
机构：
[1] Kyoto Univ, Dept Elect Sci & Engn, Kyoto 6158510, Japan
[2] Kyoto Univ, Engn Educ Res Ctr, Kyoto 6158530, Japan
[3] Kyoto Univ, Photon & Elect Sci & Engn Ctr, Kyoto 6158520, Japan
[4] Tokyo Metropolitan Ind Technol Res Inst, Tokyo 1350064, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2022年 / 61卷 / 09期
关键词：
D O I：
10.35848/1347-4065/ac8401
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页数：1
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