Influence of Xe+-ion irradiation on the microstructure of diamond-like carbon films

The optical and electrical properties of diamond-like carbon films irradiated with Xe+ ions (energy: 80 keV, fluence range: 6 x 10(12)-1.2 x 10(16) cm(-2)) have been investigated. It was shown that high-density cascades developing under irradiation with heavy Xe ions lead to changes of the subsystem of graphite-like nanoclusters in diamond-like carbon films, which essentially differ from changes due to irradiation with light ions. The changes can be divided into five subsequent steps: (1) destruction of some nanoclusters, initially existing in diamond-like carbon films; (2) ballistic shrinkage of clusters; (3) the sharp increase of nanocluster sizes because of hydrogen desorption; (4) strong reduction of the cluster growth; (5) accumulation of defects in clusters. The steps are clearly distinguished in the optical and electrical characteristics of the investigated films. (C) 2001 Elsevier Science Ltd. All rights reserved.