rf electrode sheath formation near a concave electrode

被引：10

作者：

Orlov, KE ^{[1
]}

Malik, DA ^{[1
]}

Chernoiziumskaya, TV ^{[1
]}

Smirnov, AS ^{[1
]}

机构：

[1] St Petersburg State Polytech Univ, Dept Plasma Phys, St Petersburg 195251, Russia

来源：

PHYSICAL REVIEW LETTERS | 2004年 / 92卷 / 05期

关键词：

D O I：

10.1103/PhysRevLett.92.055001

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this work we present experimental results concerning electrode sheath and ion flux formation near a concave electrode with the dimension of a cavity comparable to the electrode sheath length. It is shown that the secondary electron emission can play a crucial role in plasma molding over the electrode surface. It is also observed that plasma has a tendency to "self-leakage" in electrode cavities.

引用

页数：3

共 14 条

[1]

BOHM C, 1993, REV SCI INSTRUM, V64, P31, DOI 10.1063/1.1144398

[2]

KAUFMAN HR, 1990, HDB PLASMA PROCESSIN

[3] Plasma molding over surface topography: Energy and angular distribution of ions extracted out of large holes [J].

Kim, CK ;

Economou, DJ .

JOURNAL OF APPLIED PHYSICS, 2002, 91 (05) :2594-2603

[4] Plasma molding over surface topography: Simulation and measurement of ion fluxes, energies and angular distributions over trenches in RF high density plasmas [J].

Kim, D ;

Economou, DJ ;

Woodworth, JR ;

Miller, PA ;

Shul, RJ ;

Aragon, BP ;

Hamilton, TW ;

Willison, CG .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 2003, 31 (04) :691-702

[5]

KOHLER K, 1985, J APPL PHYS, V57, P59, DOI 10.1063/1.335396

[6] ANALYTICAL SOLUTION FOR CAPACITIVE RF SHEATH [J].

LIEBERMAN, MA .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1988, 16 (06) :638-644

[7] MONTE-CARLO SIMULATIONS OF ELECTRON DISTRIBUTIONS IN THE SHEATH REGION OF REACTIVE-ION-ETCHING PLASMAS [J].

MAY, PW ;

KLEMPERER, DF ;

FIELD, D .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (04) :1634-1643

[8]

Mc Daniel E.W., 1964, Collision Phenomena in Ionized Gases

[9]

Moskalev B. I., 1969, HOLLOW CATHODE DISCH

[10] Gamma-electron dynamics and radio frequency capacitive sheath diagnostics [J].

Orlov, KE ;

Smirnov, AS .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1999, 27 (05) :1348-1352

← 1 2 →