New dynamic silicon photonic components enabled by MEMS technology

被引：1

作者：

Errando-Herranz, Carlos ^{[1
]}

Edinger, Pierre ^{[1
]}

Colangelo, Marco ^{[1
]}

Bjork, Joel ^{[1
]}

Ahmed, Samy ^{[1
]}

Stemme, Goran ^{[1
]}

Niklaus, Frank ^{[1
]}

Gylfason, Kristinn B. ^{[1
]}

机构：

[1] KTH Royal Inst Technol, Osquldas Vag 10, Stockholm, Sweden

来源：

SILICON PHOTONICS XIII | 2018年 / 10537卷

基金：

欧洲研究理事会; 瑞典研究理事会;

关键词：

MEMS; silicon photonics; tuning; ring resonator; waveguide dispersion; surface grating coupler; RING-RESONATOR;

D O I：

10.1117/12.2297588

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Silicon photonics is the study and application of integrated optical systems which use silicon as an optical medium, usually by confining light in optical waveguides etched into the surface of silicon-on-insulator (SOI) wafers. The term microelectromechanical systems (MEMS) refers to the technology of mechanics on the microscale actuated by electrostatic actuators. Due to the low power requirements of electrostatic actuation, MEMS components are very power efficient, making them well suited for dense integration and mobile operation. MEMS components are conventionally also implemented in silicon, and MEMS sensors such as accelerometers, gyros, and microphones are now standard in every smartphone. By combining these two successful technologies, new active photonic components with extremely low power consumption can be made. We discuss our recent experimental work on tunable filters, tunable fiber-to-chip couplers, and dynamic waveguide dispersion tuning, enabled by the marriage of silicon MEMS and silicon photonics.

引用

页数：7

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