Calibration test bench for three-axis accelerometers

This paper describes and analyzes critically an experimental methodology for the calibration of three-axis accelerometers with reference to sinusoidal vibrations in the range up to 5 Hz. The approach is based on a rotary disk, moved by a high performance, high accuracy servomotor, for the realization of the reference accelerations along different axes and on the sensitivity matrix for the evaluation of main and transversal sensitivities. Therefore, the method is expected to supply sensitivity values and bias values for the all three axes. Particular attention has been paid to the evaluation of the effect of the procedural aspects and of the main interfering quantities, in order to set low the whole calibration uncertainty, even though simple and economical solution are considered for the test bench. The results of a sample calibration of a three- axis MEMS accelerometer are discussed for evaluation purposed of the proposed methodology.