Field emission from carbon nanotubes films prepared on etched silicon is presented. The etched Si surface has hillockslike form. CNTs films were obtained in two-step method consisting of physical vapor deposition and chemical vapor deposition. For some samples CNTs growth mainly on the top of the hillocks. Field emission from these structures were observed and emission current (at 25 V/mu m) was 0.01-0.03mA. The current - voltage characteristics and an interpretation of observed emission were performed on base of Fowler-Nordheim theory. The short-term stability measurement of emission were also performed.