Surface Acoustic Wave (SAW) Sensors: Physics, Materials, and Applications

被引:202
作者
Mandal, Debdyuti [1 ]
Banerjee, Sourav [1 ]
机构
[1] Univ South Carolina, Integrated Mat Assessment & Predict Simulat Lab, Columbia, SC 29208 USA
关键词
surface acoustic waves (SAW); chemical sensors; point-of-care (POC); biosensors; SAW devices; SAW wave; lithium niobate; lithium tantalate; interdigitated electrodes; IDT; crystal cut; MEMS; ZnO; AlN; GaAs; GaN; Rayleigh wave; Love wave; Lamb wave; SH-wave; ON-A-CHIP; THIN-FILMS; MICROFLUIDIC CHANNEL; SYSTEMS MEMS; LABEL-FREE; ZNO; DESIGN; MANIPULATION; BIOSENSOR; CELLS;
D O I
10.3390/s22030820
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Surface acoustic waves (SAWs) are the guided waves that propagate along the top surface of a material with wave vectors orthogonal to the normal direction to the surface. Based on these waves, SAW sensors are conceptualized by employing piezoelectric crystals where the guided elastodynamic waves are generated through an electromechanical coupling. Electromechanical coupling in both active and passive modes is achieved by integrating interdigitated electrode transducers (IDT) with the piezoelectric crystals. Innovative meta-designs of the periodic IDTs define the functionality and application of SAW sensors. This review article presents the physics of guided surface acoustic waves and the piezoelectric materials used for designing SAW sensors. Then, how the piezoelectric materials and cuts could alter the functionality of the sensors is explained. The article summarizes a few key configurations of the electrodes and respective guidelines for generating different guided wave patterns such that new applications can be foreseen. Finally, the article explores the applications of SAW sensors and their progress in the fields of biomedical, microfluidics, chemical, and mechano-biological applications along with their crucial roles and potential plans for improvements in the long-term future in the field of science and technology.
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页数:38
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