Phase transition by Mg doping of N-face polarity GaN

被引:3
|
作者
Sarigiannidou, E [1 ]
Monroy, E [1 ]
Hermann, M [1 ]
Andreev, T [1 ]
Holliger, P [1 ]
Monnoye, S [1 ]
Mank, H [1 ]
Daudin, B [1 ]
Eickhoff, M [1 ]
机构
[1] UJF, CNRS, Equipe Mixte CEA, DRFMC,SP2M,PSC, F-38054 Grenoble, France
关键词
D O I
10.1002/pssc.200461429
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report the effect of Mg on the properties of both Ga-face and N-face GaN grown by plasma-assisted molecular-beam epitaxy. We demonstrate a homogeneous incorporation of Mg in the epilayers, with the Mg content being about one order of magnitude lower in N-face GaN compared to Ga-face material. In the case of Ga-face GaN, segregating Mg inhibits the formation of the self-regulated Ga film which is used as a surfactant for the growth of undoped and Si-doped GaN layers. The growth window of GaN:Mg is hence significantly reduced. In contrast, Mg doping of N-face GaN favors the synthesis of 3C-GaN, which becomes the dominant polytype for Mg concentrations higher than 3x10(18) cm(-3). High-resolution transmission electron microscopy images reveal the cubic ordering of the GaN nitride layer, with the [111] axis perpendicular to the substrate.
引用
收藏
页码:2216 / 2219
页数:4
相关论文
共 50 条
  • [31] Improving backside (N-face) GaN substrate roughening by pre-annealing for GaN-on-GaN LED
    Alias, Ezzah A.
    Ibrahim, Norasmida
    DenBaars, Steven P.
    Chanlek, Narong
    Taib, M. Ikram Md
    Zainal, Norzaini
    OPTICAL MATERIALS, 2021, 121
  • [32] Modeling of polarization charge in N-face InGaN/GaN MQW solar cells
    Belghouthi, R.
    Taamalli, S.
    Echouchene, F.
    Mejri, H.
    Belmabrouk, H.
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2015, 40 : 424 - 428
  • [33] Al-based contacts on Ga-face and N-face n-GaN wafer grown by using hydride vapor phase epitaxy
    Kwak, JS
    Cho, J
    Sone, C
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2006, 48 (06) : 1259 - 1263
  • [34] Surface and Electrical Properties of Inductively-coupled Plasma-etched N-face n-GaN and a Method of Reducing the Ohmic Contact Resistance of Plasma-damaged N-face n-GaN
    Jeong, Tak
    Lee, Hyun Haeng
    Kim, Kang Ho
    Jeon, Seong Ran
    Lee, Seung Jae
    Lee, Sang Hern
    Baek, Jong Hyeob
    Lee, June Key
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2009, 55 (03) : 1140 - 1144
  • [35] Ohmic Contacts on N-Face n-Type GaN After Low Temperature Annealing
    Redaelli, Luca
    Muhin, Anton
    Einfeldt, Sven
    Wolter, Peter
    Weixelbaum, Leonhard
    Kneissl, Michael
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2013, 25 (13) : 1278 - 1281
  • [36] N-Face GaN/AlGaN HEMTs Fabricated Through Layer Transfer Technology
    Chung, Jinwook W.
    Piner, Edwin L.
    Palacios, Tomas
    IEEE ELECTRON DEVICE LETTERS, 2009, 30 (02) : 113 - 116
  • [37] In situ metalorganic chemical vapor deposition of Al2O3 on N-face GaN and evidence of polarity induced fixed charge
    Liu, X.
    Kim, J.
    Suntrup, D. J.
    Wienecke, S.
    Tahhan, M.
    Yeluri, R.
    Chan, S. H.
    Lu, J.
    Li, H.
    Keller, S.
    Mishra, U. K.
    APPLIED PHYSICS LETTERS, 2014, 104 (26)
  • [38] Photoreflectance studies of (A1)Ga- and N-face AlGaN/GaN heterostructures
    Buchheim, C
    Winzer, AT
    Goldhahn, R
    Gobsch, G
    Ambacher, O
    Link, A
    Eickhoff, M
    Stutzmann, M
    THIN SOLID FILMS, 2004, 450 (01) : 155 - 158
  • [39] Non-alloyed Cr/Au Ohmic contacts to N-face and Ga-face n-GaN
    Yan, Liang-Jyi
    Kuo, Cheng Huang
    Sheu, Jinn-Kong
    Lee, Ming-Lun
    Tseng, Wei-Chun
    Sheu, J.-K. (jksheu@mail.ncku.edu.tw), 1600, Elsevier Ltd (516): : 38 - 40
  • [40] Non-alloyed Cr/Au Ohmic contacts to N-face and Ga-face n-GaN
    Yan, Liang-Jyi
    Kuo, Cheng Huang
    Sheu, Jinn-Kong
    Lee, Ming-Lun
    Tseng, Wei-Chun
    JOURNAL OF ALLOYS AND COMPOUNDS, 2012, 516 : 38 - 40