Phase transition by Mg doping of N-face polarity GaN

被引:3
|
作者
Sarigiannidou, E [1 ]
Monroy, E [1 ]
Hermann, M [1 ]
Andreev, T [1 ]
Holliger, P [1 ]
Monnoye, S [1 ]
Mank, H [1 ]
Daudin, B [1 ]
Eickhoff, M [1 ]
机构
[1] UJF, CNRS, Equipe Mixte CEA, DRFMC,SP2M,PSC, F-38054 Grenoble, France
关键词
D O I
10.1002/pssc.200461429
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report the effect of Mg on the properties of both Ga-face and N-face GaN grown by plasma-assisted molecular-beam epitaxy. We demonstrate a homogeneous incorporation of Mg in the epilayers, with the Mg content being about one order of magnitude lower in N-face GaN compared to Ga-face material. In the case of Ga-face GaN, segregating Mg inhibits the formation of the self-regulated Ga film which is used as a surfactant for the growth of undoped and Si-doped GaN layers. The growth window of GaN:Mg is hence significantly reduced. In contrast, Mg doping of N-face GaN favors the synthesis of 3C-GaN, which becomes the dominant polytype for Mg concentrations higher than 3x10(18) cm(-3). High-resolution transmission electron microscopy images reveal the cubic ordering of the GaN nitride layer, with the [111] axis perpendicular to the substrate.
引用
收藏
页码:2216 / 2219
页数:4
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