Electron-beam irradiation induced optical transmittance enhancement for Au/ITO and ITO/Au/ITO multilayer thin films

被引：32
作者：
Wei, Wenzuo
Hong, Ruijin [1 ]
Wang, Jinxia
Tao, Chunxian
Zhang, Dawei
机构：
[1] Univ Shanghai Sci & Technol, Minist Educ, Engn Res Ctr Opt Instrument & Syst, Shanghai 200093, Peoples R China
来源：
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY | 2017年 / 33卷 / 10期
基金：
中国国家自然科学基金;
关键词：
EB irradiation; Multilayer thin films; Structure; Optical electrical properties; Transmittance; SANDWICH STRUCTURE; SOLAR-CELLS; TIN-OXIDE; AU FILMS; TRANSPARENT; DISPLAYS; ITO;
D O I：
10.1016/j.jmst.2017.07.006
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Electron beam (EB) irradiation experiments on Au/ITO and ITO/Au/ITO multilayer thin films are reported. The structure and the optical-electrical properties of the samples were investigated by X-ray diffraction, atomic force microscopy, four-point probe resistivity measurement system, and UV-vis-NIR double beam spectrometer, respectively. Those results show that the EB irradiation has the effects of improving the crystalline of samples, widening the optical band gap of both thin films, reducing the sheet resistance, and improving the transmittance of samples. (C) 2017 Published by Elsevier Ltd on behalf of The editorial office of Journal of Materials Science & Technology.
引用
收藏
页码：1107 / 1112
页数：6
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