Effects of Zn doping in the substrate on the quantum well intermixing in GaAs/Al0.24Ga0.76As single quantum well structures

被引:0
作者
Zhao, F [1 ]
Choi, IW [1 ]
Hing, P [1 ]
Yuan, S [1 ]
Ong, TK [1 ]
Ooi, BS [1 ]
Jiang, J [1 ]
Chan, MCY [1 ]
Surya, C [1 ]
Li, EH [1 ]
机构
[1] Sch Mat Engn, Singapore 639798, Singapore
来源
ADVANCED MICROELECTRONIC PROCESSING TECHNIQUES | 2000年 / 4227卷
关键词
quantum well intermixing; GaAs/AlGaAs; Zn-doped substrate; rapid thermal annealing; photoluminescence;
D O I
10.1117/12.405387
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Zn diffusion usually enhances the intermixing in GaAs/AlGaAs quantum well structures. However, Krames et al reported the reduction of layer intermixing in GaAs/AlGaAs quantum well heterostructures by an initial low-temperature "blocking" Zn diffusion. Zn is commonly used as the dopant of the p-type GaAs substrate. To the best of our knowledge, the effect of Zn diffusion from the Zn-doped GaAs substrate on the intermixing has nor been studied. In this work, we report the suppression of GaAs/AlGaAs quantum well intermixing by Zn doping in the GaAs substrate. Three samples with single GaAs/Al0.24Ga0.76As quantum wells were used in the work, all grown together by molecular beam epitaxy, but on three different substrates: Zn-doped p-type GaAs, Si-doped n-type GaAs, and semi-insulating GaAs. The samples were annealed together in a rapid thermal processor at temperatures around 900 degreesC. Photoluminescence measurements were then performed to characterize the samples. The sample with Zn-doped GaAs substrate shows more than 50% suppression of quantum well intermixing compared to the other two samples. It is due to Zn diffusion from the substrate into the quantum well, which induces the reduction in the number of group-III vacancies in the quantum well structure.
引用
收藏
页码:169 / 174
页数:6
相关论文
共 50 条
  • [31] InGaAs/GaAs quantum well intermixing using proton irradiation for non-absorbing mirror
    Yun, Ye Seul
    Kim, SangHyeon
    Ryu, Han-Youl
    Park, Min-Su
    Jang, Hojin
    Song, Jong Han
    Lim, Weon Cheol
    Chang, Young Jun
    Choi, Won Jun
    CURRENT APPLIED PHYSICS, 2016, 16 (09) : 1005 - 1008
  • [32] The effects of InP grown by He-plasma assisted epitaxy on quantum-well intermixing
    Yin, T
    Letal, GJ
    Robinson, BJ
    Thompson, DA
    IEEE JOURNAL OF QUANTUM ELECTRONICS, 2001, 37 (03) : 426 - 429
  • [33] Study on Quantum Well Intermixing Induced by Zn Impurities in GaInP/AlGaInP Red Semiconductor Lasers
    He Tianjiang
    Liu Suping
    Li Wei
    Lin Nan
    Xiong Cong
    Ma Xiaoyu
    ACTA PHOTONICA SINICA, 2024, 53 (01)
  • [34] Optical properties of GaAs/AlGaAs selectively doped quantum well structures
    Tabata, A
    Levine, A
    Ceschin, AM
    Quivy, AA
    Scolfaro, LMR
    Enderlein, R
    Leite, JR
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1998, 146 (1-4): : 207 - 214
  • [35] Exciton luminescence in In0.3Ga0.7As/GaAs quantum well heterostructures
    Syrbu, N.
    Dorogan, A.
    Dragutan, N.
    Vieru, T.
    Ursaki, V.
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2011, 44 (01) : 202 - 206
  • [36] Photoluminescence Monitored Sustainable Digital Photocorrosion of GaAs/Al0.35Ga0.65As Quantum Well Microstructures
    St-Onge, Rene
    Hassen, Mohamed Walid
    Moteshareie, Houman
    Tayabali, Azam F.
    Dubowski, Jan J.
    PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS, 2025,
  • [37] PHOTOLUMINESCENCE OF AN INALAS/INGAAS QUANTUM-WELL STRUCTURE GROWN ON A GAAS SUBSTRATE
    HARMAND, JC
    MATSUNO, T
    INOUE, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (02): : L233 - L235
  • [38] Pulsed-laser irradiation quantum well intermixing process in GaInAs/GaInAsP laser structures
    Ong, TK
    Chen, YW
    Ooi, BS
    Lam, YL
    Chan, YC
    MICROELECTRONIC ENGINEERING, 2000, 51-2 : 349 - 355
  • [39] Electrically injected GaAsBi/GaAs single quantum well laser diodes
    Liu, Juanjuan
    Pan, Wenwu
    Wu, Xiaoyan
    Cao, Chunfang
    Li, Yaoyao
    Chen, Xiren
    Zhang, Yanchao
    Wang, Lijuan
    Yan, Jinyi
    Zhang, Dongliang
    Song, Yuxin
    Shao, Jun
    Wang, Shumin
    AIP ADVANCES, 2017, 7 (11):
  • [40] Monolithic growth of GaAs/Al0.3Ga0.7As multiple quantum well structure on Ge substrate with low defects: theoretical and experimental correlation of the structural and optical properties
    Kumar, Ravinder
    Panda, Debiprasad
    Saha, Jhuma
    Tongbram, Binita
    Das, Debabrata
    Kumar, Raman
    Chakrabarti, Subhananda
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2020, 53 (43)