Frequency dependency of the characteristics in the spiral type thin film inductors

被引：0
|
作者：
Min, BK [1 ]
Kim, IS [1 ]
Song, JS [1 ]
机构：
[1] Korea Electrotechnol Res Inst, Chang Won 641120, South Korea
来源：
MICRO- AND NANOTECHNOLOGY: MATERIALS, PROCESSES, PACKAGING, AND SYSTEMS II | 2005年 / 5650卷
关键词：
spiral inductor; inductance; quality factor; thin film;
D O I：
10.1117/12.582204
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this study, spiral inductors on the SiO2/Si(100) substrate were fabricated by the magnetron sputtering method. Cu thin film with the thickness of 0.7-2.0 mu m was deposited on the substrate. Square inductors were fabricated through the wet chemical etching technique. The inductors are completely specified by the number of turns, coil width and the cod spacing. Both the width and spacing were varied from 10 to 50 mu m and from 20 to 70 mu m, respectively. The Frequency dependency of inductance and Q factor were investigated to analyze the performance of spiral inductors.
引用
收藏
页码：400 / 407
页数：8
相关论文
共 50 条
  • [21] Comparative characteristics of thick film solenoid-bar type inductors
    Ljiljana, Zivanov
    Desnica, Vladan
    Aleksic, Obrad
    Proceedings of the International Semiconductor Conference, CAS, 1999, 1 : 295 - 298
  • [22] Comparison of frequency responses of spiral inductors with different figures
    Lee, JM
    Lee, TW
    Park, SH
    Min, BG
    Park, MP
    Lee, KH
    Choi, IH
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2001, 16 (02) : 66 - 71
  • [23] CHARACTERISTICS OF MAGNETIC THIN-FILM INDUCTORS AT LARGE MAGNETIC-FIELD
    YAMAGUCHI, M
    OKUYAMA, H
    ARAI, KI
    IEEE TRANSACTIONS ON MAGNETICS, 1995, 31 (06) : 4229 - 4231
  • [24] The Analysis of the Multilayer Spiral Inductors Parameters at High Frequency
    Andreica, Sergiu
    Pacurar, Claudia
    Topa, Vasile
    Racasan, Adina
    Constantinescu, Claudia
    Gliga, Marian
    2017 7TH INTERNATIONAL CONFERENCE ON MODERN POWER SYSTEMS (MPS), 2017,
  • [25] APPLICATION OF YIG FILM TO THIN-FILM INDUCTORS
    ARAI, KI
    YAMAGUCHI, M
    OHZEKI, H
    MATSUMOTO, M
    IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) : 5337 - 5339
  • [26] Temperature Dependence of Thin Film Spiral Inductors on Alumina over a Temperature Range of 25 to 475° C
    Ponchak, George E.
    Jordan, Jennifer L.
    Scardelletti, Maximilian C.
    2010 PROCEEDINGS 60TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2010, : 713 - 719
  • [27] Integrated solenoid-type inductors for high frequency applications and their characteristics
    Kim, YJ
    Allen, MG
    48TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE - 1998 PROCEEDINGS, 1998, : 1247 - 1252
  • [28] Circuit Modeling of Nonlinear Lossy Frequency Dependent Thin-Film Magnetic Inductors
    Elsherbini, Adel
    Braunisch, Henning
    O'Brien, Kevin
    2012 IEEE 21ST CONFERENCE ON ELECTRICAL PERFORMANCE OF ELECTRONIC PACKAGING AND SYSTEMS, 2012, : 105 - 108
  • [29] The effects of a ground shield on the characteristics and performance of spiral inductors
    Yim, SM
    Chen, T
    O, KK
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 2002, 37 (02) : 237 - 244
  • [30] Effects of Eddy Current on Characteristics of Spiral Inductors on Silicon
    Nishikawa, Kazuyasu
    Shintani, Kenji
    Yamakawa, Satoshi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (10) : 1065021 - 1065029
12345