共 21 条
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Material processing of dielectrics with femtosecond lasers
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LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV,
1999, 3618
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Femtosecond laser ablation of silicon-modification thresholds and morphology
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APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
2002, 74 (01)
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Femtosecond laser pulse ablation of GaAs and InP: studies utilizing scanning and transmission electron microscopy
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APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
2003, 77 (3-4)
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Laser ablation threshold and etch rate comparison between the ultrafast Yb fiber-based FCPA laser and a Ti:Sapphire laser for various materials
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FIFTH INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION,
2004, 5662
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Plasma effects during ablation and drilling using pulsed solid-state lasers
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LASER PROCESSING OF ADVANCED MATERIALS AND LASER MICROTECHNOLOGIES,
2003, 5121
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MARS: Femtosecond laser mask advanced repair system in manufacturing
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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1999, 17 (06)
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Femtosecond laser ablation of metals: Precise measurement and analytical model for crater profiles
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THIRD INTERNATIONAL SYMPOSIUM ON LASER PRECISION MICROFABRICATION,
2003, 4830
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