Development of a tip enhanced near-field laser ablation system for the sub-micrometric analysis of solid samples

被引:13
|
作者
Jabbour, Chirelle [1 ]
Lacour, Jean-Luc [1 ]
Tabarant, Michel [2 ]
Semerok, Alexandre [2 ]
Chartier, Frederic [3 ]
机构
[1] CEA Saclay, DEN, DANS, DPC,SEARS,Nucl Isotop & Elemental Analyt Dev Lab, F-91191 Gif Sur Yvette, France
[2] CEA Saclay, DEN, DANS, DPC,SEARS,Surfaces Engn & Lasers Lab, F-91191 Gif Sur Yvette, France
[3] CEA Saclay, DEN, DANS, DPC, F-91191 Gif Sur Yvette, France
关键词
PLASMA-MASS SPECTROMETRY; LA-ICP-MS; ATMOSPHERIC-PRESSURE; SPECTROSCOPY; MICROSCOPY;
D O I
10.1039/c6ja00044d
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
A near-field laser ablation system was developed for the analysis of inorganic solid samples in the nanometer resolution range. The instrument is based on the coupling of a nanosecond Nd:YAG laser with an atomic force microscope. The technique uses a tip enhancement effect obtained by the interaction of laser radiation with the conductive tip of the AFM maintained at a few nanometers above the sample surface. By applying this technique to conducting gold and semiconducting silicon samples, a lateral resolution of 100 nm was demonstrated. With a single laser pulse, craters of about 100 nm in diameter and a few nanometers in depth were obtained. A multi-parametric study was carried out in order to understand the effect of different experimental parameters (laser fluence, tip-to-sample distance, sample and tip nature) on the near-field laser ablation efficiency, crater dimensions and amount of ablated material. Numerical simulations of the localized heating with a home-made 3-D code presented a good explanation for the nanometer-sized crater diameters obtained in our experiments.
引用
收藏
页码:1534 / 1541
页数:8
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