Fabrication and Characterization of Flexible Capacitive Humidity Sensors Based on Graphene Oxide on Porous PTFE Substrates

被引：12

作者：

Wei, Zhenyu ^{[1
]}

Huang, Jianqiu ^{[1
]}

Chen, Wenhao ^{[1
]}

Huang, Qingan ^{[1
]}

机构：

[1] Southeast Univ, Minist Educ, Key Lab MEMS, Nanjing 210096, Peoples R China

来源：

SENSORS | 2021年 / 21卷 / 15期

基金：

中国国家自然科学基金;

关键词：

humidity sensor; flexibility substrate; polytetrafluoroethylene (PTFE); hydrophobic; POLYTETRAFLUOROETHYLENE; ELECTRODES; REDUCTION;

D O I：

10.3390/s21155118

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Porous polytetrafluoroethylene (PTFE) is physically flexible, thermally and chemically stable, relatively inexpensive, and commercially available. It is attractive for various flexible sensors. This paper has studied flexible capacitive humidity sensors fabricated on porous PTFE substrates. Graphene oxide (GO) was used as a sensing material, both hydrophobic and hydrophilic porous PTFE as the substrates, and interdigitated electrodes on the PTFE substrates were screen-printed. SEM and Raman spectrum were utilized to characterize GO and PTFE. An ethanol soak process is developed to increase the yield of the humidity sensors based on hydrophobic porous PTFE substrates. Static and dynamic properties of these sensors are tested and analyzed. It demonstrates that the flexible capacitive humidity sensors fabricated on the ethanol-treated hydrophobic PTFE exhibit high sensitivity, small hysteresis, and fast response/recovery time.

引用

页数：14

共 25 条

[1] THE GROTTHUSS MECHANISM
AGMON, N
[J]. CHEMICAL PHYSICS LETTERS, 1995, 244 (5-6) : 456 - 462
[2] Highly porous and flexible capacitive humidity sensor based on self-assembled graphene oxide sheets on a paper substrate
Alrammouz, R.
Podlecki, J.
Vena, A.
Garcia, R.
Abboud, P.
Habchi, R.
Sorli, B.
[J]. SENSORS AND ACTUATORS B-CHEMICAL, 2019, 298
[3] Ultrahigh humidity sensitivity of graphene oxide
Bi, Hengchang
Yin, Kuibo
Xie, Xiao
Ji, Jing
Wan, Shu
Sun, Litao
Terrones, Mauricio
Dresselhaus, Mildred S.
[J]. SCIENTIFIC REPORTS, 2013, 3
[4] Impedance Behaviour of a Microporous PMMA-Film 'Coated Constant Phase Element' based Chemical Sensor
Biswas, Karabi
Thomas, Litty
Chowdhury, Sourabh
Adhikari, Basudam
Sen, Siddhartha
[J]. INTERNATIONAL JOURNAL ON SMART SENSING AND INTELLIGENT SYSTEMS, 2008, 1 (04): : 922 - 939
[5] REFINEMENT OF A VALENCE FORCE FIELD FOR POLYTETRAFLUOROETHYLENE BY A DAMPED LEAST-SQUARES METHOD
BOERIO, FJ
KOENIG, JL
[J]. JOURNAL OF CHEMICAL PHYSICS, 1970, 52 (09) : 4826 - &
[6] Chen W.H., 2019, P 2019 IEEE SENSORS P 2019 IEEE SENSORS, V1, P1
[7] Cheng-Long Zhao, 2011, TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, P1954, DOI 10.1109/TRANSDUCERS.2011.5969243
[8] Fabrication and Materials Integration of Flexible Humidity Sensors for Emerging Applications
Delipinar, Tugce
Shafique, Atia
Gohar, Maryam Sepehri
Yapici, Murat Kaya
[J]. ACS OMEGA, 2021, 6 (13): : 8744 - 8753
[9] Wearable biosensors for healthcare monitoring
Kim, Jayoung
Campbell, Alan S.
de Avila, Berta Esteban-Fernandez
Wang, Joseph
[J]. NATURE BIOTECHNOLOGY, 2019, 37 (04) : 389 - 406
[10] RAMAN SCATTERING AND BAND ASSIGNMENTS IN POLYTETRAFLUOROETHYLENE
KOENIG, JL
BOERIO, FJ
[J]. JOURNAL OF CHEMICAL PHYSICS, 1969, 50 (07) : 2823 - &

← 1 2 3 →