Characterization and performance of Schottky diode based on wide band gap semiconductor ZnO using a low-cost and simplified sol-gel spin coating technique

被引:48
作者
Farag, A. A. M. [2 ]
Farooq, W. A. [3 ]
Yakuphanoglu, F. [1 ]
机构
[1] Firat Univ, Dept Met & Mat Engn, TR-23169 Elazig, Turkey
[2] Ain Shams Univ, Fac Educ, Dept Phys, Thin Film Lab, Cairo 11757, Egypt
[3] King Saud Univ, Coll Sci, Dept Phys & Astron, Riyadh 11451, Saudi Arabia
关键词
Schottky contact; n-ZnO; Barrier height; Series resistance; SPRAY-DEPOSITED FLUORINE; ZINC-OXIDE FILMS; C-V-F; THIN-FILMS; CURRENT-VOLTAGE; ELECTRICAL-PROPERTIES; SERIES RESISTANCE; SI; TEMPERATURE; PRECURSOR;
D O I
10.1016/j.mee.2011.03.016
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this study, a Schottky diode based on wide band gap semiconductor ZnO was fabricated on p-type Si substrate using sol-gel spin coating method. Al/ZnO/p-Si diode indicates a rectification behavior. At lower voltages, the forward current of the diode was found to obey the intrinsic thermally generated charge carriers and at relatively higher voltages, the current mechanism of the diode is controlled by a space charge limited conduction mechanism. Under reverse bias conditions, the current-voltage characteristics of the diode exhibit the lower current as compared under forward bias, indicating the existence of a current limitation mechanism induced by two field lowering mechanisms which are Poole-Frenkel and Schottky mechanisms. The parameters, series resistance R(S), the ideality factor n and the barrier height phi(B0) of the diode were determined by performing different plots obtained from the experimental forward bias current-voltage. The capacitance measurements show that the values of capacitance were almost independent of the forward bias under various frequencies. The higher values of the capacitance at low frequencies were attributed to the excess capacitance resulting from the interface states in equilibrium with the ZnO. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:2894 / 2899
页数:6
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