COMMON FLEXIBLE CHANNEL STRUCTURE FOR INTEGRATION OF THREE-AXIS FORCE SENSOR AND SOFT MICRO ACTUATOR

被引：0

作者：

Otake, Shohei ^{[1
]}

Mori, Fuminari ^{[1
]}

Konishi, Satoshi ^{[1
]}

机构：

[1] Ritsumeikan Univ, Kusatsu, Shiga, Japan

来源：

2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2019年

关键词：

D O I：

10.1109/memsys.2019.8870621

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents integrated sensor and actuator in the same soft structure. Three-axis force sensor composed of three standing strain sensors is enabled by making the best use of its deformable flexible structure. Both force sensor and pneumatic actuator are fabricated by using common channel structures. The force sensor uses liquid metal introduced into the channel and the pneumatic actuator uses pressure supplied through the channel. We focused on the characteristic of the liquid metal strain sensor and three-axis force can be sensed by standing the strain sensors. Sensitivity of the sensor according to Fx, Fy and Fz was calculated 0.016 N-1 , 0.019 N-1 and 0.035 N-1 , respectively. The maximum generating force of integrated soft actuator was 13.3mN.

引用

页码：652 / 655

页数：4

共 15 条

[11]

Otake S., 31 IEEE INT C MICR M, P615

[12] Tactile sensor array using microcantilever with nickel-chromium alloy thin film of low temperature coefficient of resistance and its application to slippage detection [J].